Back-scattering and neutralization coefficients of nitrogen ions on iron surface
The coefficients of back-scattering and neutralization of nitrogen ions (N⁺) on iron surface during ion bombardment at the processes of ion sputtering and niriding have been calculated using TRIM code. The pure iron target and two-element targets, Fe+Mo (1 and 5%), Fe+W (1 and 5%), were tested. The...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2022
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| Cite this: | Back-scattering and neutralization coefficients of nitrogen ions on iron surface / A. Kuzmichev, M. Melnichenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 129-133. — Бібліогр.: 12 назв. — англ. |
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| citation_txt | Back-scattering and neutralization coefficients of nitrogen ions on iron surface / A. Kuzmichev, M. Melnichenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 129-133. — Бібліогр.: 12 назв. — англ. |
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| description | The coefficients of back-scattering and neutralization of nitrogen ions (N⁺) on iron surface during ion bombardment at the processes of ion sputtering and niriding have been calculated using TRIM code. The pure iron target and two-element targets, Fe+Mo (1 and 5%), Fe+W (1 and 5%), were tested. The ion energy was from 0.1 to 70 keV. The ions N+ are considered to be back-scattering in the form of energetic N atoms. The calculations showed the back-scattering and neutralization coefficients are tens of percent for low energies N⁺ ions and several percent for energies of tens kiloelectron-volts. The average penetration depth of the ions into the Fe target and the ion sputtering coefficients are calculated, too.
Коефіцієнти зворотного розсіювання та нейтралізації іонів азоту на поверхні заліза під час іонного бомбардування у процесах іонного розпилення та азотування були розраховані за допомогою програми TRIM. Випробовували мішень із чистого заліза та двоелементні мішені Fe+Mo (1 та 5 %), Fe+W (1 та 5 %). Енергія іонів становила від 0,1 до 70 кеВ. Вважалося, що іони N⁺ розсіюються назад у формі енергетичних атомів N. Розрахунки показують, що коефіцієнти зворотного розсіювання та нейтралізації складають десятки відсотків для низькоенергетичних іонів N⁺ і кілька відсотків для енергій у десятки кілоелектронвольт. Також розраховано середню глибину проникнення іонів азоту в Fe-мішень та коефіцієнти іонного розпилення.
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ISSN 1562-6016. Problems of Atomic Science and Technology. 2022. №6(142).
Series: Plasma Physics (28), p. 129-133. 129
https://doi.org/10.46813/2022-142-129
BACK-SCATTERING AND NEUTRALIZATION COEFFICIENTS
OF NITROGEN IONS ON IRON SURFACE
A. Kuzmichev
1
, M. Melnichenko
1,2
1
Igor Sikorsky Kyiv Polytechnic Institute, Kyiv, Ukraine;
2
RPE «ОТТОМ», Ltd., Kharkiv, Ukraine
E-mail: kuzmichev-kpi@ukr.net
The coefficients of back-scattering and neutralization of nitrogen ions (N
+
) on iron surface during ion
bombardment at the processes of ion sputtering and niriding have been calculated using TRIM code. The pure iron
target and two-element targets, Fe+Mo (1 and 5 %), Fe+W (1 and 5 %), were tested. The ion energy was from 0.1 to
70 keV. The ions N
+
are considered to be back-scattering in the form of energetic N atoms. The calculations showed
the back-scattering and neutralization coefficients are tens of percent for low energies N
+
ions and several percent
for energies of tens kiloelectron-volts. The average penetration depth of the ions into the Fe target and the ion
sputtering coefficients are calculated, too.
PACS: 52.80.Tn, 34.50.Dy
INTRODUCTION
Plasma physics and technology deal with different
kinds of gas discharges, in which various types of high-
energy species, including charged and neutral particles,
are generated and interacting with gas medium and solid
electrodes [1, 2]. Herein, the electrodes are not only
collectors of particles, but also diffuse reflectors of
particles: electrons from anodes, heavy particles from
cathodes. The latter particles are the former ions and
neutrals bombing the cathodes in gas discharges or the
targets in ion devices. In addition, it should be noted
various types of secondary emission from electrodes,
including sputtering and evaporation of their surface.
Of all the noted processes of interaction of heavy
particles with cathodes/targets, the data on the process
of back-scattering or reflection of ions are least
represented in the literature. This process is more or less
known for light ions [3] and for some types of ions used
in back-scattering spectroscopy [3, 4]. In the literature
on ion sputtering of thin films, there are some data on
the back-scattering of argon ions in connection with the
problem of argon incorporation into deposited films and
the influence of the energy, transferred by back-
scattered fast Ar atoms, on the formation of the film
microstructure [2]. At the same time, there are very few
data on the back-scattering of nitrogen ions, although
nitrogen is widely used in the important technologies of
ion implantation and nitriding, nitride coating, for
sterilization as well [5-8]. It should also be noted that
the bombardment of the solid surface with molecular
N2
+
ions (namely, such ions are mainly generated in
discharges) leads to the dissociation of the molecules
into atomic particles, which then act individually [6].
The atomic nitrogen (N or N
+
) is very reactive that
promotes the processes with its participation; therefore,
it is important to be aware of atomic nitrogen generation
by the back-scattering in the gaseous medium in the
vicinity of the surface treated by ion bombardment.
The atomic and molecular ions are neutralized upon
collision with metals; hence, almost all of them are
back-scattered in the form of high-energy neutral atoms
[3, 4]. Correspondently, the calculated back-scattering
coefficients will also characterize the generation of
high-energy atomic neutrals near the electrode
bombarded by different nitrogen ions.
Since the technology of nitriding is aimed mostly at
the processing of iron materials [8], this paper is
devoted to such a case.
1. METHOD OF RESEARCH
The research was performed with the TRIM
(TRansport of Ions in Matter) code, which presents a
statistical simulation of ion motion within the target
material using the Monte Carlo method [9, 10]. The
TRIM code in comparison with the others is often
discussed elsewhere in literature [5, 6, 10] and it is
shown that calculations with this code give a good
agreement with the experiment. Also, to be additionally
sure of obtaining correct results on back-scattering, the
coefficients of iron sputtering by nitrogen ions have
been calculated with the same TRIM program and then
compared with experiments [11].
The process of scattering the primary bombarding
ions is modeled as a sequence of random binary
collisions with target atoms. A random arrangement of
atoms within the target, i.e. its amorphous
microstructure, with a fixed average distance between
atoms, is assumed. On a rectilinear free path, the energy
of the primary particle continuously decreases by the
value of electronic (inelastic) losses and after the
collision by nuclear (elastic) losses with the transfer of
energy to the recoil atom of the target (the Ziegler-
Biersack-Littmark collision model is used [9]). The
motion of recoil atoms in their multistage collisional
processes is also traced. The trajectory of the primary
particle (the former ion) or the recoil atom is terminated
if their energy drops to a given value (~10 eV) or if they
go beyond the target.
Schematically modeled processes of ion back-
scattering from the target, wandering ions within the
130 ISSN 1562-6016. Problems of Atomic Science and Technology. 2022. №6(142)
target and sputtering target atoms are shown in Figure.
Primary N
+
ions (I
+
) can be back-scattered both from
surface target Fe atoms (A1) in a single collision and
from deep target Fe atoms (A2) as a result of multiple
collisions with the corresponding loss of initial energy
or get stuck within the target. The target Fe atoms
(recoil atoms), which have received sufficient kinetic
energy in the direction normal to the surface as a result
of collisions, form a stream of sputtered Fe atoms (S).
The exit of particles from the target is possible if the
energy of recoil atoms is greater than the value of the
potential surface barrier or the surface binding energy
(SBE). The SBE is usially determined by the
sublimation energy of the target material [3, 9, 10].
Such approach is accepted in the TRIM code.
Schemes of the processes of scattering N atoms from the
surface target and within the volume of the target as
well as of sputtering target Fe atoms during ion
bombardment. A1,2 are recoil Fe atoms of the target
material, I
+
1,2 are primary ions N
+
, I′1,2 are energetic N
atoms scattered from the target, I″1,2 are energetic N
atoms moving and scattered inside the target, S1,2 are
sputtered target Fe atoms
Most of the particles back-scattered from the target
are neutralized ions that are neutral N atoms. The main
characteristics of the process of back-scattering are the
integral coefficients of back-scattering (reflection) of
ions/atoms RN and energy RE. The coefficient RN. is
defined as the ratio of the total number of scattered
atoms NR, regardless of their energy, angle of departure
and charge, to the number of primary particles N0 (in
terms of atoms) bombarding the target (or discharge
cathode):
2 000
1 iE
N
R
N ddF
NN
N
R , where FN is
the distribution of NR particles over the energy and
angles of departure from the target per unit solid angle
, Ei is the energy of the primary ions. Coefficient
2 000
1 iE
N
ii
R
E ddF
NENE
NE
R is defined as the
fraction of energy carried away by back-scattered
atoms. Average energy of back-scattered atoms is
i
N
E E
R
R
E . The ion sputtering coefficient S is
determined similarly:
2 000
1 iE
s
S ddF
NN
N
S ,
where NS is the number of sputtered atoms, FS is the
distribution of NS atoms over the energy and angles of
departure from the target per unit solid angle . The
coefficients RN, RE, and S depend on Ei, the angle of
incidence of ions, atomic numbers and masses of
bombarding ions and target atoms. An important
characteristic of the back-scattering atoms is their
distribution over the angles of departure from the target.
Experiments show that in the case of normal incidence
of ions on the non-monocrystal target, the angular
distribution of scattering particles obeys the cosine law
[3, 4]. In the paper the normal incidence of ions on the
target is assumed.
Since iron alloys in the forms of various sorts of
steel are most often subjected to ion treatment [8], the
effect of Mo and W additives to iron on the back-
scattering of nitrogen ions was studied, too. In this case,
we proceeded from the assumption that the heavier Mo
and W atoms will act as scattering centers due to their
larger mass with directing nitrogen particles from inside
the target towards the surface. Accordingly, recoil Fe
atoms will also be directed towards the surface and
create a stream of sputtered material. Testing lighter
additives commonly found in alloy steels is of less
interest. The partial sputtering coefficients for Fe, Mo
and W were calculated with the same TRIM code.
The studies were carried out in a wide range of
bombarding ion energies (0.1...70.0 keV), where low
energies correspond to the technology of low-voltage
nitriding and ion sputtering, while high energies
correspond to the nitriding by ion implantation.
In the calculations, as it is said above, the presence
of the potential surface barrier, which determined by the
SBE value, is used [3, 9, 10]. In Table, the SBE value
for the single-element Fe target is given. In the
calculations for the two-element targets, the arithmetic
averages of the sums of SBE for both elements are used
[9, 10], see Table, too.
2. CALCULATION RESULTS AND
DISCUSSION
Table gives the results of calculations of the
coefficients of ion back-scattering RN, the average
penetration depth of nitrogen ions into the target body L,
the ion sputtering coefficients S for the single-element
(Fe) and the partial sputtering coefficients (see numbers
through a slash) for the two-element (Fe+Mo, Fe+W)
targets at different energies of atomic N
+
ions, bombing
the targets. The two-element targets contain one or five
percent additives of Mo and W to Fe.
As mentioned above with reference to [3, 4], the
ions scattered by the metal are almost completely
neutralized, so we believe that the RN coefficient also
determines the ion nitrogen neutralization coefficient.
We are not aware of the experimental data on the RN
values for the combination “N
+
ion – Fe target” and we
cannot directly verify the adequacy of the obtained RN
values. However, the indirect confirmation of the
adequacy can be the fact that the ion sputtering
coefficients calculated with the same TRIM program are
quantitatively consistent with published S values for
iron [11]. The extremal nature of the obtained
dependence of the sputtering coefficient S on the energy
of N
+
ions with a broad maximum at energy in the range
of 2...5 keV is confirmed, too [11].
ISSN 1562-6016. Problems of Atomic Science and Technology. 2022. №6(142) 131
Coefficients of back-scattering RN, average penetration depth of nitrogen ions into the target body L and ion
sputtering coefficients S
Energy of N
+
ions (Ei), keV
Parameters
Target (cathode) material
Fe Fe + 1 % Mo Fe + 5 % Mo Fe + 1 % W Fe + 5 % W
Surface binding energy, eV
4.34 5.585 5.585 6.51 6.51
0.1 RN 0.26 0.23 0.24 0.23 0.24
L, Å 7 7 7 7 7
S 0.33 0.25/0.005 0.23/0.01 0.02/0.003 0.20/0.008
0.2 RN 0.22 0.21 0.22 0.22 0.22
L, Å 10 10 10 10 10
S 0.51 0.38/0.007 0.37/0.02 0.31/0.005 0.30/0.01
0.3 RN 0.20 0.20 0.21 0.20 0.21
L, Å 12 12 12 12 12
S 0.65 0.48/0.008 0.47/0.02 0.41/0.005 0.37/0.02
0.4 RN 0.19 0.20 0.19 0.20 0.20
L, Å 14 14 14 14 14
S 0.77 0.56/0.01 0.54/0.02 0.46/0.007 0.44/0.02
0.5 RN 0.16 0.18 0.19 0.19 0.19
L, Å 16 16 16 16 17
S 0.83 0.62/0.01 0.60/0.02 0.54/0.007 0.50/0.02
0.6 RN 0.18 0.18 0.18 0.19 0.19
L, Å 18 18 18 18 18
S 0.92 0.66/0.01 0.64/0.03 0.55/0.01 0.56/0.02
0.7 RN 0.17 0.18 0.17 0.18 0.18
L, Å 19 20 20 20 20
S 0.97 0.70/0.01 0.67/0.03 0.60/0.01 0.57/0.02
0.8 RN 0.17 0.17 0.17 0.17 0.18
L, Å 21 21 22 22 22
S 1.01 0.72/0.01 0.71/0.03 0.61/0.01 0.60/0.02
0.9 RN 0.17 0.17 0.17 0.17 0.18
L, Å 23 23 23 23 24
S 1.04 0.77/0.01 0.74/0.03 0.63/0.01 0.63/0.02
1.0 RN 0.16 0.16 0.16 0.17 0.18
L, Å 25 25 25 25 25
S 1.06 0.78/0.01 0.74/0.03 0.66/0.01 0.66/0.02
2.0 RN 0.14 0.14 0.15 0.15 0.16
L, Å 40 39 40 39 40
S 1.20 0.91/0.01 0.91/0.04 0.76/0.01 0.75/0.03
5.0 RN 0.11 0.12 0.12 0.12 0.13
L, Å 77 78 77 78 79
S 1.18 0.89/0.02 0.92/0.04 0.81/0.01 0.76/0.03
10.0 RN 0.09 0.09 0.09 0.1 0.1
L, Å 135 135 136 135 138
S 1.09 0.83/0.01 0.80/0.04 0.71/0.01 0.72/0.03
20.0 RN 0.07 0.07 0.07 0.07 0.08
L, Å 244 247 249 251 249
S 0.87 0.72/0.01 0.63/0.03 0.54/0.01 0.55/0.02
40.0 RN 0.04 0.04 0.04 0.05 0.05
L, Å 461 459 462 459 462
S 0.63 0.48/0.01 0.45/0.02 0.42/0.006 0.41/0.02
70.0 RN 0.03 0.03 0.03 0.03 0.04
L, Å 773 779 775 781 776
S 0.46 0.35/0.006 031/0.01 0.28/0.004 0.29/0.01
The decreasing character of energy dependence of
the RN coefficient for N
+
is consistent with the data for
other ions [3, 12]. The obtained data show that at ion
energies Ei 100 eV, which are typical for nitriding at
pressures about 100 Pa, more than a quarter of the
bombarding ions are back-scattered in the neutral state.
132 ISSN 1562-6016. Problems of Atomic Science and Technology. 2022. №6(142)
And the higher the pressure near the target (cathode),
the more back-scattered nitrogen atoms is to be, since
the energy of the bombarding ions decreases due to their
often collisions with gas molecules. At ion energy of
hundreds of electron-volts, the RN coefficient is
16...20 %, at energy of several kiloelectron-volts –
about 10%, at energy of tens of kiloelectron-volts – a
few percent.
In most of our cases, the energy of back-scattered N
atoms is tens percent of Ei but the RE value is less than
the RN value by about an order of magnitude as with
other light gas ions [3, 12].
At energy of up to 200 eV, the average depth of ion
ballistic penetration into iron and its alloys is several
angstroms; at energy up to 10 keV – tens of angstroms
and hundreds of angstroms at higher energies.
The analysis of changes in the values of the
calculated parameters makes it possible to assess how
heavy metal atoms in iron act as scattering centers. In
general, the addition of W, as the heaviest element, has
a noticeably stronger effect on the change in parameters
compared to the addition of Mo. The influence of the
additives on different parameters manifests itself in
different ways. The RN increases with increasing
additives; at low energies the increase of RN for
Fe + 5 % W approximately corresponds to the
percentage of W, i.e. ~ 5 %; at high energies, the effect
is greater (10...20 %). The additives have little effect on
the average depth of penetration of bombarding
particles into the target (at the percentage level at
energies of tens of kiloelectron-volts); at low energies
the effect is not noticeable. The sputtering of iron
decreases with increasing addition of both Mo and W.
The noted features can be explained by the opposite
scattering vector of nitrogen ions and recoil atoms in
collisions with Fe, Mo and W atoms. So, when nitrogen
ions and recoil atoms move down into the target, they
can be scattered by heavy atoms towards the surface;
when nitrogen ions and recoil atoms move upwards,
scattering downwards is possible. The scattering
downwards decreases ion sputtering coefficients.
CONCLUSIONS
Thus, kinetic simulation by the Monte-Carlo method
of the processes of interaction of nitrogen ions (N
+
) with
iron surface was successfully fulfilled. The ion energy
was 0.1...70 keV; the materials of the target (it may be a
discharge cathode) were pure iron (Fe) and iron with
addition of Mo (1 or 5 %) and W (1 or 5 %). The
coefficients of back-scattering of ions N
+
as neutral N
atoms and ion sputtering of the iron targets, as well as
average penetration depth of nitrogen ions into the
target body, have been calculated.
The results obtained on the back-scattering of N
+
ions do not contradict the data for other types of ions,
and the values of the coefficient of ion sputtering of iron
are consistent with the experiment from the literature,
which indicates the adequacy of the calculation results.
It is established that the back-scattering coefficient
of the bombarding ions was rather high, more than 25 %
at ion energies Ei 100 eV, and about 10 % at ion
energies of several kiloelectron-volts.
Since positive ions are neutralized upon contact with
the metal due to the Auger process, the back-scattering
coefficient and the ion sputtering coefficient are
practically independent of what the particle bombards
the metal, that is charged or neutral ones. In this regard,
the results of calculations can also be applied to the
bombardment of Fe by high-energy nitrogen atoms (N).
This fact, taking into account the dissociation of
molecular nitrogen ions during metal bombardment,
makes it possible to apply the results of calculations of
the back-scattering and ion sputtering coefficients to the
case of bombardment of iron by molecular ions N2
+
. For
this, the values of the calculated coefficients for the half
energy of the bombarding ions N2
+
(i.e. per one particle
in the molecule) are used, followed by their doubling.
The same can be done in the case of bombardment
of iron with high-energy molecules N2. Such molecules
are generated during the charge exchange of ions N2
+
on
neutral nitrogen molecules N2, when the ions N2
+
move
towards the target or cathode in a gaseous medium.
The obtained data on the back-scattering of nitrogen
ions and generation of energetic neutral atoms can be
used for understanding various features of technological
systems with nitrogen ion beams or plasma.
As a future task of research, it is possible to propose
the study of the effect on back-scattering nitrogen ions
of the creation of iron nitride inside the target.
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ion reflection from solid. Amsterdam: “North-Holland
Publ. Co”, 1985.
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interactions: fundamentals and applications. UK,
Cambridge: «Cambridge University Press», 1996.
6. P. Phadke, J.M. Sturm, R.W.E. van der Kruijs.
F. Bijkerk. Sputtering and nitidation of transition metal
surface under low energy, steady state nitrogen ion
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7. A.I. Kuzmichev, M.S. Melnichenko, V.M. Shulaev.
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bombardment of heavy d-metals by ions from nitrogen
plasma // Rus. Phys. Journ. 2021, v. 63, № 10, p. 1743-
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10. W. Eckstein. Computer Simulation of Ion-Solid
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Article received 30.09.2022
КОЕФІЦІЄНТИ ЗВОРОТНОГО РОЗСІЮВАННЯ ТА НЕЙТРАЛІЗАЦІЇ ІОНІВ АЗОТУ
НА ПОВЕРХНІ ЗАЛІЗА
А. Кузьмичєв, М. Мельниченко
Коефіцієнти зворотного розсіювання та нейтралізації іонів азоту на поверхні заліза під час іонного
бомбардування у процесах іонного розпилення та азотування були розраховані за допомогою програми
TRIM. Випробовували мішень із чистого заліза та двоелементні мішені Fe+Mo (1 та 5 %), Fe+W (1 та 5 %).
Енергія іонів становила від 0,1 до 70 кеВ. Вважалося, що іони N
+
розсіюються назад у формі енергетичних
атомів N. Розрахунки показують, що коефіцієнти зворотного розсіювання та нейтралізації складають
десятки відсотків для низькоенергетичних іонів N
+
і кілька відсотків для енергій у десятки
кілоелектронвольт. Також розраховано середню глибину проникнення іонів азоту в Fe-мішень та
коефіцієнти іонного розпилення.
|
| id | nasplib_isofts_kiev_ua-123456789-195913 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-01T08:12:06Z |
| publishDate | 2022 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Kuzmichev, A. Melnichenko, M. 2023-12-08T11:04:30Z 2023-12-08T11:04:30Z 2022 Back-scattering and neutralization coefficients of nitrogen ions on iron surface / A. Kuzmichev, M. Melnichenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 129-133. — Бібліогр.: 12 назв. — англ. 1562-6016 PACS: 52.80.Tn, 34.50.Dy DOI: https://doi.org/10.46813/2022-142-129 https://nasplib.isofts.kiev.ua/handle/123456789/195913 The coefficients of back-scattering and neutralization of nitrogen ions (N⁺) on iron surface during ion bombardment at the processes of ion sputtering and niriding have been calculated using TRIM code. The pure iron target and two-element targets, Fe+Mo (1 and 5%), Fe+W (1 and 5%), were tested. The ion energy was from 0.1 to 70 keV. The ions N+ are considered to be back-scattering in the form of energetic N atoms. The calculations showed the back-scattering and neutralization coefficients are tens of percent for low energies N⁺ ions and several percent for energies of tens kiloelectron-volts. The average penetration depth of the ions into the Fe target and the ion sputtering coefficients are calculated, too. Коефіцієнти зворотного розсіювання та нейтралізації іонів азоту на поверхні заліза під час іонного бомбардування у процесах іонного розпилення та азотування були розраховані за допомогою програми TRIM. Випробовували мішень із чистого заліза та двоелементні мішені Fe+Mo (1 та 5 %), Fe+W (1 та 5 %). Енергія іонів становила від 0,1 до 70 кеВ. Вважалося, що іони N⁺ розсіюються назад у формі енергетичних атомів N. Розрахунки показують, що коефіцієнти зворотного розсіювання та нейтралізації складають десятки відсотків для низькоенергетичних іонів N⁺ і кілька відсотків для енергій у десятки кілоелектронвольт. Також розраховано середню глибину проникнення іонів азоту в Fe-мішень та коефіцієнти іонного розпилення. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Problems of Atomic Science and Technology Low temperature plasma and plasma technologies Back-scattering and neutralization coefficients of nitrogen ions on iron surface Коефіцієнти зворотного розсіювання та нейтралізації іонів азоту на поверхні заліза Article published earlier |
| spellingShingle | Back-scattering and neutralization coefficients of nitrogen ions on iron surface Kuzmichev, A. Melnichenko, M. Low temperature plasma and plasma technologies |
| title | Back-scattering and neutralization coefficients of nitrogen ions on iron surface |
| title_alt | Коефіцієнти зворотного розсіювання та нейтралізації іонів азоту на поверхні заліза |
| title_full | Back-scattering and neutralization coefficients of nitrogen ions on iron surface |
| title_fullStr | Back-scattering and neutralization coefficients of nitrogen ions on iron surface |
| title_full_unstemmed | Back-scattering and neutralization coefficients of nitrogen ions on iron surface |
| title_short | Back-scattering and neutralization coefficients of nitrogen ions on iron surface |
| title_sort | back-scattering and neutralization coefficients of nitrogen ions on iron surface |
| topic | Low temperature plasma and plasma technologies |
| topic_facet | Low temperature plasma and plasma technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/195913 |
| work_keys_str_mv | AT kuzmicheva backscatteringandneutralizationcoefficientsofnitrogenionsonironsurface AT melnichenkom backscatteringandneutralizationcoefficientsofnitrogenionsonironsurface AT kuzmicheva koefícíêntizvorotnogorozsíûvannâtaneitralízacíííonívazotunapoverhnízalíza AT melnichenkom koefícíêntizvorotnogorozsíûvannâtaneitralízacíííonívazotunapoverhnízalíza |