Back-scattering and neutralization coefficients of nitrogen ions on iron surface

• Published in: Problems of Atomic Science and Technology
• Date: 2022
• Main Authors: Kuzmichev, A., Melnichenko, M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/195913
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Back-scattering and neutralization coefficients of nitrogen ions on iron surface / A. Kuzmichev, M. Melnichenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 129-133. — Бібліогр.: 12 назв. — англ.

The coefficients of back-scattering and neutralization of nitrogen ions (N⁺) on iron surface during ion bombardment at the processes of ion sputtering and niriding have been calculated using TRIM code. The pure iron target and two-element targets, Fe+Mo (1 and 5%), Fe+W (1 and 5%), were tested. The...