Bombardment of the surface by a low-energy ion flow accelerated in the near-surface layer of the space charge

• Published in: Problems of Atomic Science and Technology
• Date: 2023
• Main Authors: Hrechkо, Ya., Babenko, Ie., Sereda, I., Azarenkov, N.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2023
• Subjects: Plasma dynamics and plasma-wall interaction
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/196047
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Bombardment of the surface by a low-energy ion flow accelerated in the near-surface layer of the space charge / Ya. Hrechkо, Ie. Babenko, I. Sereda , N. Azarenkov // Problems of Atomic Science and Technology. — 2023. — № 1. — С. 47-50. — Бібліогр.: 7 назв. — англ.

The paper presents a method for the formation of low-energy ion flow for creation and treatment of functional coatings without radiation damage. Plasma source based in arc discharge with filament cathode creates the primary plasma in the volume of vacuum chamber where the treated sample is placed. T...