Bombardment of the surface by a low-energy ion flow accelerated in the near-surface layer of the space charge

• Veröffentlicht in: Problems of Atomic Science and Technology
• Datum: 2023
• ISSN: 1562-6016
• Hauptverfasser: Hrechkо, Ya., Babenko, Ie., Sereda, I., Azarenkov, N.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2023
• Schlagworte: Plasma dynamics and plasma-wall interaction
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/196047
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Bombardment of the surface by a low-energy ion flow accelerated in the near-surface layer of the space charge / Ya. Hrechkо, Ie. Babenko, I. Sereda , N. Azarenkov // Problems of Atomic Science and Technology. — 2023. — № 1. — С. 47-50. — Бібліогр.: 7 назв. — англ.

The paper presents a method for the formation of low-energy ion flow for creation and treatment of functional coatings without radiation damage. Plasma source based in arc discharge with filament cathode creates the primary plasma in the volume of vacuum chamber where the treated sample is placed. T...