Morphology and sputtering of tungsten nitrides coatings exposed to deuterium plasma

• Published in: Problems of Atomic Science and Technology
• Date: 2023
• Main Authors: Tolstolutskaya, G.D., Kuprin, A.S., Nikitin, A.V., Vasilenko, R.L.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2023
• Subjects: Plasma dynamics and plasma-wall interaction
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/196049
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Morphology and sputtering of tungsten nitrides coatings exposed to deuterium plasma / G.D. Tolstolutskaya, A.S. Kuprin, A.V. Nikitin, R.L. Vasilenko // Problems of Atomic Science and Technology. — 2023. — № 1. — С. 57-62. — Бібліогр.: 25 назв. — англ.

Processes of sputtering, surface modification and change in the stoichiometric composition of W and WN coatings deposited on stainless steel by cathodic arc evaporation were studied under the influence of low-energy (500 eV/D) deuterium plasma with fluence of (1…4.5)·10²⁴ D₂⁺/m² at room temperature....