Radiation-acoustic effects at diamond-like coating deposition from the flow of hydrocarbon ions and their influence on kinetic processes

• Veröffentlicht in: Problems of Atomic Science and Technology
• Datum: 2023
• Hauptverfasser: Kalinichenko, O.I., Strel’nitskij, V.E.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2023
• Schlagworte: Physics of radiation and ion-plasma technologies
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/196096
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Radiation-acoustic effects at diamond-like coating deposition from the flow of hydrocarbon ions and their influence on kinetic processes / O.I. Kalinichenko, V.E. Strel’nitskij // Problems of Atomic Science and Technology. — 2023. — № 2. — С. 110-117. — Бібліогр.: 12 назв. — англ.

Based on the model of the nonlocal thermoelastic peak (NTP) the ion generalized to the case of the ion of polyatomic molecule, the acoustic effect of low-energy ion of a hydrocarbon molecule during plasma-ion deposition of diamond-like carbon coating is investigated. The generation of a stress wave...