Radiation-acoustic effects at diamond-like coating deposition from the flow of hydrocarbon ions and their influence on kinetic processes
Based on the model of the nonlocal thermoelastic peak (NTP) the ion generalized to the case of the ion of polyatomic molecule, the acoustic effect of low-energy ion of a hydrocarbon molecule during plasma-ion deposition of diamond-like carbon coating is investigated. The generation of a stress wave...
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| Datum: | 2023 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2023
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| Schriftenreihe: | Problems of Atomic Science and Technology |
| Schlagworte: | |
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/196096 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Radiation-acoustic effects at diamond-like coating deposition from the flow of hydrocarbon ions and their influence on kinetic processes / O.I. Kalinichenko, V.E. Strel’nitskij // Problems of Atomic Science and Technology. — 2023. — № 2. — С. 110-117. — Бібліогр.: 12 назв. — англ. |