Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten

• Veröffentlicht in: Problems of Atomic Science and Technology
• Datum: 2023
• Hauptverfasser: Manuilenko, O.V., Prokhorenko, E.M., Pavlii, K.V., Zajtsev, B.V., Dubniuk, S.N., Lytvynenko, V.V., Kasatkin, Yu.A., Prokhorenko, T.G.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2023
• Schlagworte: Applications and technologies
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/196160
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Influence of helium ions beams with energies 0.12 MeV on sputtering process on surface of tungsten / O.V. Manuilenko, E.M. Prokhorenko, K.V. Pavlii, B.V. Zajtsev, S.N. Dubniuk, V.V. Lytvynenko, Yu.A. Kasatkin, T.G. Prokhorenko // Problems of Atomic Science and Technology. — 2023. — № 3. — С. 158-163. — Бібліогр.: 26 назв. — англ.

The samples of tungsten with a purity of 99.5 and 99.7% were irradiated with helium ion beams (EHe⁺ = 0.12 MeV). The total sputtering coefficients for the sample depth up to 60 Å from the surface of sample were obtained. It was found that on the surface of tungsten, the number of pits (the flecking...