Plasma treatment of titanium dioxide film for black TiO₂

• Published in: Problems of Atomic Science and Technology
• Date: 2023
• Main Authors: Frolova, E.K., Khomych, V.O., Kravchuk, R.M., Kolomys, O.F., Gudenko, Yu.M., Pylypchuk, O.S., Styopkin, V.I., Dobrovolskiy, A.M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2023
• Subjects: Applications and technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/196201
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Plasma treatment of titanium dioxide film for black TiO₂ / E.K. Frolova, V.O. Khomych, R.M. Kravchuk, O.F. Kolomys, Yu.M. Gudenko, O.S. Pylypchuk, V.I. Styopkin, A.M. Dobrovolskiy // Problems of Atomic Science and Technology. — 2023. — № 4. — С. 180-183. — Бібліогр.: 9 назв. — англ.

The results of the treatment of TiO₂ film in volume discharge with an Ar/H₂ mixture are presented. The treated film demonstrates the changes in transparency and conductivity. Raman spectra show no changes in the phase state of the film after plasma treatment. Представлено результати обробки плівки Т...