Using nanosphere lithography for fabrication of a multilayered system of ordered gold nanoparticles

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2017
• Main Authors: Styopkin, V.I., Liakhovetskyi, V., Rudenko, V.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2017
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/214925
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Using nanosphere lithography for fabrication of a multilayered system of ordered gold nanoparticles / V.I. Styopkin, V. Liakhovetskyi, V. Rudenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 2. — С. 240-245. — Бібліогр.: 15 назв. — англ.

A new modification of nanosphere lithography has been realized to obtain multilayered systems of ordered gold nanoparticles (NP). NP have been formed using vacuum deposition of a 5…60-nm layer of gold on ionic etched multilayered regular coating consisting of several layers of 200-nm polystyrene sph...