Quantum-size effects in semiconductor heterosystems

Created based on Si, GaAs, and C₆₀ fullerenes, low-dimensional heterostructures with a surface quantum-size effect at the film-substrate interface. There have been defined technological conditions of its appearance. Using modulation electroreflectance spectroscopy, spectral broadening parameters, th...

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Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2017
Автори: Matveeva, L.A., Venger, E.F., Kolyadina, E.Yu., Neluba, P.L.
Формат: Стаття
Мова:Англійська
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2017
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Цитувати:Quantum-size effects in semiconductor heterosystems / L.A. Matveeva, E.F. Venger, E.Yu. Kolyadina, P.L. Neluba // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 2. — С. 224-230. — Бібліогр.: 27 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
_version_ 1860279398889947136
author Matveeva, L.A.
Venger, E.F.
Kolyadina, E.Yu.
Neluba, P.L.
author_facet Matveeva, L.A.
Venger, E.F.
Kolyadina, E.Yu.
Neluba, P.L.
citation_txt Quantum-size effects in semiconductor heterosystems / L.A. Matveeva, E.F. Venger, E.Yu. Kolyadina, P.L. Neluba // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 2. — С. 224-230. — Бібліогр.: 27 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description Created based on Si, GaAs, and C₆₀ fullerenes, low-dimensional heterostructures with a surface quantum-size effect at the film-substrate interface. There have been defined technological conditions of its appearance. Using modulation electroreflectance spectroscopy, spectral broadening parameters, the energy relaxation time of excited light charge carriers, the energy of quantized levels, and the width of the quantum wells.
first_indexed 2026-03-21T13:44:44Z
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fulltext Semiconductor Physics, Quantum Electronics & Optoelectronics, 2017. V. 20, N 2. P. 224-230. doi: https://doi.org/10.15407/spqeo20.02.224 © 2017, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 224 PACS 78.40.Ri Quantum-size effects in semiconductor heterosystems L.A. Matveeva, E.F. Venger, E.Yu. Kolyadina, P.L. Neluba V.E. Lashkarov Institute of Semiconductor Physics NAS of Ukraine, 45, prospect Nauky, 03028 Kyiv, Ukraine E-mail: matveeva@isp.kiev.ua Abstract. Created on the basis of Si, GaAs and C60 fullerenes were low-dimensional heterostructures with a surface quantum-size effect at the film-substrate interface. There have been defined technological conditions of its appearance. Using modulation electroreflectance spectroscopy, calculated were spectral broadening parameters, the energy relaxation time of excited light charge carriers, the energy of quantized levels and the width of the quantum wells. Keywords: heterostructures, interface, electroreflectance, electronic parameters, quantum-size effect. Manuscript received 27.01.17; revised version received 11.04.17; accepted for publication 14.06.17; published online 18.07.17. 1. Introduction Physical properties of heterosystems are not a simple sum of the contacting materials. They acquire new electronic and optical properties due to appearance of the surface potential, internal mechanical stresses, built-in electric fields and quantum size effects at the film- substrate interface. When the size of the region of free charge carrier localization becomes comparable with the free length, their movement is restricted to one, two or three directions. Low-dimensional heterosystems have a different energy dependence of the electron density of states in the band structure, which depends on their dimensions. Decreasing localization of free charge carriers reduces heterosystem dimensionality. These heterosystems can be two-dimensional with quantum wells, one-dimensional in the case of quantum wires and zero-dimensional when quantum dots are available. The energy dependence of the density of electron states in these low-dimensional structures is different. Monotonous quadratic energy dependence, which is typical for bulk sample, becomes discrete. For two- dimensional structures, it is monotonous and changes stepwise with increasing the energy of charge carriers. For one-dimensional structures, it is continuous and sawtooth, and is set of dashed lines for zero-dimensional structures [1]. It is necessary to distinguish between the bulk quantum-size effect in heterosystems with a rectangular quantum well, where quantized are both types of charge carriers, from the surface quantum-size effect, when quantized is only one their type in the triangular quantum well. Transformation of the band structure in the low-dimensional heterosystems leads to changes in their electronic and optical properties [2]. Silicon is still the main material of semiconductor electronics. Gallium arsenide ranks second after the silicon and is also widely used in optoelectronics. On its basis, there are LEDs, lasers, photodetectors and solar cells. Sulfidation of the GaAs surface decreases the density of surface electronic states and increases the intensity of photoluminescence [3]. Development of technology for production of fullerenes in the form of film material on different substrates expands the use of nanostructures with C60 fullerenes [4], including solar cells [5, 6] and sensors of physical quantities [7]. Modulation electroreflectance spectroscopy has considerable advantages in comparison with classical reflectance and transmittance spectroscopy. When investigating the band structure of semiconductors, their electronic and optical properties, the sensitivity of this method is several orders of magnitude more sensitive than the classical optical methods. The advantage of the modulation spectra is that they reveal the thin structure usually hidden unstructured background. The electroreflectance method is more sensitive to the band structure of the semiconductors, because its signal is the Semiconductor Physics, Quantum Electronics & Optoelectronics, 2017. V. 20, N 2. P. 224-230. doi: https://doi.org/10.15407/spqeo20.02.224 © 2017, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 225 third derivative of the optical constants. The signal exists at the critical points of the Brillouin zone only in the region of direct transitions, and it disappears at some distance from the critical point. The electroreflectance signal is determined by the optical and electronic properties of the surface under study [8-10]. The purpose of this study was to find and study the surface quantum-size effect in semiconductor heterosystems based on silicon, gallium arsenide, and C60 fullerene by using modulation electroreflectance spectroscopy. 2. Experiment Measurements of electroreflectance spectra in the heterosystems were carried out with the electrolytic method. Essence of the method is to register changes in the reflectivity of the semiconductor surface ΔR/R upon application of a weak modulating electric field. Measurements were made using the setup based on the DMR-4 monochromator with automatic registration of spectra on the screen in a linear energy scale. The spectral resolution was 3 meV. The sensitivity of this apparatus for ΔR/R signal measurement reached 10–6, and the accuracy of measuring intensity was 2%. The signal was recorded within the spectral range 1.5 to 3.5 eV at room temperature in a weak-field measuring regime. The modulating voltage did not exceed 0.7 V. The samples were placed into a silica electrolytic cell with 0.1 N water KCl solution. From the photomultiplier, the signal was fed to the selective amplifier U2-6 and registered using a synchronous detector. This method allowed us to obtain information about the band structure of heterosystem on its surface and in the region of the film-substrate interface, as well as to detect its change depending on the technological conditions of heterosystems manufacturing and influence on them caused by external actions. In order to obtain heterosystems with the quantum size effect, we used anisotropic chemical etching of Si [11] and GaAs [12] surfaces, sulfide passivation of GaAs surface by chemical etching [13], neutron irradiation and annealing of Si wafers [14], as well as thermal vacuum deposition of C60 fullerenes on Si and the cover glass substrate [15]. An analysis of the electroreflectance spectra in a specific region of the k- space in the Brillouin zone for a direct transition makes it possible to determine the transition energy Eg, the phenomenological Lorentz broadening parameter Г, which allows for dissipation processes in the electron transition, and the energy relaxation time τ of the light excited charge carriers. These parameters were determined using the three-point method by Aspnes [16]. 3. Results and discussion The results of measurement of the electroreflectance spectra of the initial n-Si (100) surface and anisotropically etched in HF:HNO3 = 20:1 mixture in the course of 20…30 min depicted in Fig. 1. The electroreflectance signal of the initial surface Si was recorded in the region of 3.2 to 3.55 eV (curve 1, Fig. 1). According to the electron band structure of silicon, this electroreflectance signal corresponds to direct transitions that occur between the valence and conduction bands at the center of the Brillouin zone. In the process of anisotropic chemical etching, the surface of the Si(100) plate dimmer, and microrelief appears on the surface. The SiO2 layer of crystal modification of β-crystoballite forms at the plate surface [11]. The electroreflectance spectrum of anisotropically etched silicon surface is shown in Fig. 1, curve 2. There are inversion of the polarity signal, the value of the phenomenological parameter Γ decreases, and peaks are separated by 40 meV. At the initial surface of the silicon substrate, and also after the oxide layer is removed from the microrelief surface, the bands undergo depletion bending. The surface is depleted of electrons, and the band are bent upward (Fig. 1, spectrum 1). On the Si surface under a layer of SiO2, the potential is of enrichment type, and the bands are bent downward (Fig. 1, spectrum 2). The substrate surface is enriched with electrons, and this leads to the change in the electroreflectance signal phase at the interface SiO2–Si. The doublet nature of the peaks of electro- reflectance in anisotropically etched silicon can be explained by the effect of surface quantization of the electron energy in the enriched surface layer of silicon at the boundary. Between the SiOx layer and silicon, there is a quantum well. Availability of 2D electrons in the conduction band leads to a situation when, in addition to electron transitions between the main bands, there are transitions between the valence band and the quantized level e1 in the 2D quantum well. The presence of two transitions with energies Eg and Eg+e1 splits the peaks in the electroreflectance spectrum. Fig. 1. Electroreflectance spectra of initial (1) and anisotro- pically etched (2) silicon surfaces in the E0 transition region. Semiconductor Physics, Quantum Electronics & Optoelectronics, 2017. V. 20, N 2. P. 224-230. doi: https://doi.org/10.15407/spqeo20.02.224 © 2017, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 226 The energy of optical transitions in the quantum- sized system for the first quantization level is given by the expression e = Eg + ħ2π2/2 m*L2, (1) where Eg is the band-to-band transition energy, m* – the band-to-band effective mass, and L – width of the quantum well. The value e1 = 40 meV found from the experimental electroreflectance spectra under the assumption that the effective hole mass is mp = 0.49m0 at the point Г′25 C and that the effective electron mass is me = 0.156m0 (there m0 is the free electron mass). With allowance for the expression (1), the width of the quantum well L is 4 nm. Using the electroreflecance spectroscopy method, we also examined the microrelief As2O3–pnn+-GaAs heterostructures [12]. On the Te-doped n+-GaAs(100) substrate with electron concentration of 8⋅1018…2⋅1019 cm–3 and thickness of 300 μm, we used the CVD method to deposite the 10…15-μm Si-doped (n-type) and the 10…15-μm Zn-doped (p-type) GaAs layers with the carriers concentration of about 8⋅1016…1017 cm–3. The microrelief heterostructures were formed on the frontal surface of the pnn+-GaAs substrates by chemical etching in a 10…15 N HNO3 solution for 10 s at room temperature. Fig. 2 depicts electroreflectance of E1 and E1+Δ1 transition for initial pnn+-GaAs substrate (curve 1) and microrelief As2O3–pnn+-GaAs heterostructure obtained using 10-s anisotropic etching (curve 2). Table 1 illustrates the electron zone parameters of pnn+-GaAs substrate and relief As2O3–pnn+-GaAs heterostructure: the E1 and E1+Δ1 energy transitions, the value of spin- orbit splitting Δ1, the spectral broadening parameters Г1 and Г1+Δ1. The decease of Г parameters for the substrate in heterosystem caused by a good quality of the interface As2O3–pnn+-GaAs. Such a feature is observed repeatedly, for example, at the SiO2–Si microrelief interface [11]. Fig. 2. Electroreflectance spectra of pnn+-GaAs with flat (1) and microrelief As2O3–GaAs (2) surfaces. Table 1. Effect of anisotropic chemical etching on zone parameters of pnn+-GaAs (tACE = 10 s). Zone parameters, eV Surface type E1 E1+Δ1 Δ1 Γ1 Γ1+Δ1 Non-patterned 2.969 3.161 0.192 0.119 0.104 Patterned 2.895 3.105 0.210 0.090 0.089 In Fig. 2, there are two other remarkable features in the electroreflerctance spectrum of the microrelief sample: 1) inversion of signal polarity and 2) formation of a fine peaked structure, which is seen most clearly on the short-energy shoulder of the ER spectrum. These features may result from: 1) inversion of substrate conductivity type from p to n under formation of the inversion layer on As2O3–pnn+-GaAs interface and 2) decrease in the heterosystem dimensionality from 3D to 2D for the carrier motion in the direction perpendicular to the interface. At the interface, the triangular quantum well (QW) appears with quantized levels (QL) in the two-dimensional electron gas channel. In Fig. 2, one can see 3 quantum levels. Table 2 illustrates the energy of quantized levels En and the width of quantum well Ln at the As2O3–pnn+- GaAs interface. In accordance with Table 2, the inversion layer is presented by the triangular quantum well with energy quantum levels of 36, 64 and 93 meV on its width from 14 to 26 nm. It was applied GaAs surface passivation with sulphur to improve its structural perfection and electronic properties. Using the electroreflectance method, we investigated the real and chemically sulfided gallium arsenide surface within the spectral regions of E0 and E0+E1 transitions. Natural oxide was removed from real surface of substrate by etching for 10 min in the mixture of H2SO4:H2O2:H2O = 3:1:2 and by washing in distilled water. Then, the samples were placed for 5 to 20 min in saturated solution of Na2S·9H2O and illuminated with an incandescent lamp 500 W. After washing with distilled water, the samples were dried in a stream of warm air. Under the action of photochemical reaction, the bonds Ga–As were broken and the bonds Ga–S appeared. Investigations of GaAs surface before and after its sulfidation were carried out in the spectral range of 1.3…1.6 eV for Е0 transition and 2.6…3.4 eV for Е1 transition. Fig. 3a shows electroreflectance spectra of initial surface (curve 1) and after its sulfidation (curve 2) for E0 transition. Fig. 3b shows the corresponding spectra for E1 transition. In contrast to the initial surface of GaAs, the electroreflectance signal from sulphided surface also appeared in the region 2.5…2.65 eV. Its appearance can be explained by formation of Ga2S3 sulphide coating with Еg = 2.55 eV band [17]. The coating had a p-type conductivity, and Г = 55 meV. Semiconductor Physics, Quantum Electronics & Optoelectronics, 2017. V. 20, N 2. P. 224-230. doi: https://doi.org/10.15407/spqeo20.02.224 © 2017, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 227 Table 2. Energy position of quantum level En on the width of quantum well Ln. The position of QL En, eV Width of QW L, nm 0.036 14.08 0.064 21.11 0.093 25.7 Fig. 3. Electroreflectance spectra of initial (1) and sulphurized (2) GaAs surfaces in the Е0, Е0+Δ0 (a) and Е1, Е1+Δ1 (b) transition regions. Presented in Table 3 are electronic parameters of the electroreflectance spectra of GaAs surface for different duration of its sulphidation [18]. The decrease of Г value and increase of the energy relaxation time inherent to the excited light charge carriers (τ = ħ/Γ) for both transitions is an evidence of electronic passivation of gallium arsenide surface after its sulphidation. Decreasing Еg by 14 meV for the transition Е0 and 7 meV for Е1 is caused by occurrence of internal mechanical stresses (1.3·108 Pa) in Ga2S3–GaАs heterosystems [19]. Splitting the electroreflectance signal is associated with appearance of the surface quantum size effect in the heterosystem. In this case, the parameter Г is decreased and τ is increased at the interface, which lead to an increase in the free path of charge carriers and increases their mobility μ. Table 3. Electronic parameters of GaAs surface determined from electroreflectance spectra (region E0) at different sulfidation time. t, min E0, eV ΔE0, eV Γ, meV τ, 10–14 s μ, cm/(V·s) 0 1.451 80 0.82 2000 5 1.437 –0.014 32 2.05 3200 10 1.397 –0.054 36 1.82 3000 20 1.390 –0.061 51 1.29 2400 The method of light electroreflectance spectro- scopy was used to study crystals of p-type silicon, grown by the Czochralski method (specific resistivity was 10 Ohm·cm, oxygen concentration – 8·1017 cm–3). Measurements of electroreflectance spectra were carried out in the spectral region of 3 to 3.8 eV (direct transition Е0 in the centre of the Brillouin zone of Si). The samples were irradiated with fast neutron fluence 1015…1018 n/cm2 at 70 °C [14]. Particular attention was given to preparation of its surface to measurements [20]. It was used isothermal annealing (800 °С, 700 hours) in order to create the oxygen phase in crystals. The layer disrupted by mechanical polishing was removed by polishing etching in the mixture HF:HNO3:H2O = 1:3:1. The shape of electroreflectance signal depended on irradiation conditions and thermal treatment of the samples (the presence of oxygen-silicon precipitates, radiation defects). The electroreflectance spectrum of the initial sample was bipolar, Г = 138 meV (Fig. 4a, curve 1). After annealing of the initial sample (800 °С, 700 hours), the broadening parameter of the spectrum decreased down to 68 meV. The spectrum has shifted to the high-energy region. The annealed sample (Fig. 4a, curve 2) p-type conductivity changed to n-type. Inversion of the signal due to formation of high- temperature thermal donors occurred in the process of annealing [21]. Еg increase and decrease of the parameter Г is associated with a decrease of mechanical stresses and improvement of the structural quality of the sample surface after chemical treatment. Neutron irradiation of the samples before annealing led to transformation of the structural defects in the crystal. Radiation defects on the surface of the sample formed at lower doses than in the bulk. Therefore, the surface layer of 15-μm thickness was removed by chemical etching. At low doses, plate precipitates of crystalline phase (kristobalit) appear. With increasing of the neutron fluence, there occurred colony of microprecipitates (amorphous SiO2) [22]. Fig. 4b shows the electroreflectance spectra of silicon irradiated with the fluence 1018 n/сm2 before annealing (curve 1) and after annealing at 800 °С (curve 2). On the curve 1, two maxima are clearly seen at 3.325 and 3.403 eV. The splitting of the signal (78 meV) in annealed silicon is caused by appearance of different areas of disorder in it (accumulation of divacancies or interstitial defects). Semiconductor Physics, Quantum Electronics & Optoelectronics, 2017. V. 20, N 2. P. 224-230. doi: https://doi.org/10.15407/spqeo20.02.224 © 2017, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 228 Fig. 4. Electroreflectance spectra of monocrystalline mechani- cally polished and chemically etched silicon: a) non-annealed before irradiation (1) and annealed (2); b) irradiation fluence 1018 n/cm2 non-annealed (1) and annealed (2). Mechanical stresses change semiconductor band gap [23]. Vacancy type disordering in Si leads to appearance of tensile stresses and an increase of Еg from 3.348 up to 3.403 eV. Interstitial defects create compressive stresses, and Еg value decreases down to 3.325 eV. The local increase and decrease of Еg in the sample splits of the electroreflectance signal. After annealing at 800 °С, the regions of both types of disorder and point radiation defects are annealed, mechanical stresses of different sign compensate one another, the defect structure of the sample improves, and there is a quantum-size effect (Fig. 4b, curve 2). During annealing of the irradiated samples, there appear thermodonors and electrically active particles of a new phase SiOх. In the annealed sample, influence of the interface SiOх/Si on the band structure of heterosystem and electronic processes in it increases with growth of the neutron fluence. The negative charge compensating positive charge in the oxide accumulates during the annealing process at the interface with silicon. Bands are curved down, and charge carriers are quantized in a triangular potential well at the interface. With increasing the irradiation dose, the energy of quantized level increases from 60 up to 85 meV, and the width of the quantum well decreases from 3 down to 2 nm [14]. The discovery of new carbon molecules Cn called fullerenes has led to the appearance of a new class of carbon based solids and heterostructures [24, 25]. Among the famous fullerenes, C60 molecules are most symmetrical and stable. The carbon atoms in them have a covalent type of bonding, and the C60 molecules in the crystal have the weak bond corresponding to van der Waals interaction. The C60 films were obtained using thermal evapo- ration of C60 powder in vacuum at pressure 10–4 Pa from an effusion tantalum cell at the temperature of 650 K on non-heated n-Si and cover glass substrates [15]. The thickness of films was 0.2 μm. Substrate material does not effect on the films structure at the deposition rate 5…10 nm/s. According to [26], C60 fullerene films are a new direct band semiconductor with Eg band gap value near 1.6 eV. Fig. 5 presents the electroreflectance spectra of C60/n-Si heterosystem from the films surface (Fig. 5a) and from the interface (Fig. 5b). The band gap Eg was 1.7 eV for C60 film and 3.59 eV for Si substrate. The C60 films on n-Si substrate have p-type conductivity and the weak splitting of the electroreflectance signal. The C60 film surface on n-Si substrate is depleted on electrons, and the bands are bent upward (Fig. 5a). Splitting of the electroreflectance signal indicates appearance of weak quantum-size effect in the film. Fig. 5. Electroreflectance spectra of the film (a) and interface (b) in C60/Si heterosystem. Semiconductor Physics, Quantum Electronics & Optoelectronics, 2017. V. 20, N 2. P. 224-230. doi: https://doi.org/10.15407/spqeo20.02.224 © 2017, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 229 Fig. 6. Electroreflectance spectrum of C60 film on glass substrate. The conductivity type of C60 film on the insulating glass substrate changed from p to n, and the signal splitting increased (Fig. 6). At the interface, the film C60 is enriched with electrons, and the bands are bent downwards. The enrichment of the films with electrons contributes to appearance of interfacial electronic states. It causes a phase change of the electroreflectance signal in the C60 film on cover glass substrate [27]. The doublet nature of the electroreflectance peaks in C60 films on insulating substrate can be explained by the influence of surface quantization of electron energy in the enriched layer of C60 film on the interface (Fig. 6). The presence of two transitions with the energies Eg = 1.65 eV and Eg+e1 = 1.7 eV splintered peaks in the spectrum. The energy of quantum level e1 = 50 meV. For E0 transition in C60 film, the hole effective mass mp is 1.3m0, the electron effective mass me is 1.5m0. The reduced effective mass m* is 0.697m0. For 50 meV quantum level, the width of the quantum well is 2 nm. 4. Conclusion To obtain heterosystems with quantum size effect, the complex of technological methods was used. It included the anisotropic chemical etching of p-Si and pnn+-GaAs surface, different doses of neutron irradiation and thermal annealing of p-Si crystals with the concentration of dissolved oxygen 8⋅10–17 cm–3, the chemical sulfide passivation of n-GaAs (100) surface, C60 fullerene thermal deposition on n-Si and cover glass substrates. Electrolytic method of modulation spectroscopy of light electroreflectance is a most sensitive to the band structure of semiconductors. Therefore, it was used for investigations of the band structure and electronic parameters of the surface and interface of the heterosystems with the quantum size effect. 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id nasplib_isofts_kiev_ua-123456789-214928
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1560-8034
language English
last_indexed 2026-03-21T13:44:44Z
publishDate 2017
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Matveeva, L.A.
Venger, E.F.
Kolyadina, E.Yu.
Neluba, P.L.
2026-03-04T12:51:34Z
2017
Quantum-size effects in semiconductor heterosystems / L.A. Matveeva, E.F. Venger, E.Yu. Kolyadina, P.L. Neluba // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2017. — Т. 20, № 2. — С. 224-230. — Бібліогр.: 27 назв. — англ.
1560-8034
PACS: 78.40.Ri
https://nasplib.isofts.kiev.ua/handle/123456789/214928
https://doi.org/10.15407/spqeo20.02.224
Created based on Si, GaAs, and C₆₀ fullerenes, low-dimensional heterostructures with a surface quantum-size effect at the film-substrate interface. There have been defined technological conditions of its appearance. Using modulation electroreflectance spectroscopy, spectral broadening parameters, the energy relaxation time of excited light charge carriers, the energy of quantized levels, and the width of the quantum wells.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Quantum-size effects in semiconductor heterosystems
Article
published earlier
spellingShingle Quantum-size effects in semiconductor heterosystems
Matveeva, L.A.
Venger, E.F.
Kolyadina, E.Yu.
Neluba, P.L.
title Quantum-size effects in semiconductor heterosystems
title_full Quantum-size effects in semiconductor heterosystems
title_fullStr Quantum-size effects in semiconductor heterosystems
title_full_unstemmed Quantum-size effects in semiconductor heterosystems
title_short Quantum-size effects in semiconductor heterosystems
title_sort quantum-size effects in semiconductor heterosystems
url https://nasplib.isofts.kiev.ua/handle/123456789/214928
work_keys_str_mv AT matveevala quantumsizeeffectsinsemiconductorheterosystems
AT vengeref quantumsizeeffectsinsemiconductorheterosystems
AT kolyadinaeyu quantumsizeeffectsinsemiconductorheterosystems
AT nelubapl quantumsizeeffectsinsemiconductorheterosystems