Ellipsometry of hybrid noble metal-dielectric nanostructures
Angular ellipsometric measurements of thin Ag and Cu films covered by a HfO₂ protective layer were performed. The ellipsometric parameters ψ and ∆ were measured in θ = 43°…85° light incidence angle range, where ψ is the azimuth of restored linear polarization, ∆ and is the phase shift between p- and...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Date: | 2018 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2018
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/215317 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Ellipsometry of hybrid noble metal-dielectric nanostructures / A.L. Yampolskiy, O.V. Makarenko, L.V. Poperenko, V.O. Lysiuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2018. — Т. 21, № 4. — С. 412-416. — Бібліогр.: 16 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862714319404269568 |
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| author | Yampolskiy, A.L. Makarenko, O.V. Poperenko, L.V. Lysiuk, V.O. |
| author_facet | Yampolskiy, A.L. Makarenko, O.V. Poperenko, L.V. Lysiuk, V.O. |
| citation_txt | Ellipsometry of hybrid noble metal-dielectric nanostructures / A.L. Yampolskiy, O.V. Makarenko, L.V. Poperenko, V.O. Lysiuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2018. — Т. 21, № 4. — С. 412-416. — Бібліогр.: 16 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | Angular ellipsometric measurements of thin Ag and Cu films covered by a HfO₂ protective layer were performed. The ellipsometric parameters ψ and ∆ were measured in θ = 43°…85° light incidence angle range, where ψ is the azimuth of restored linear polarization, ∆ and is the phase shift between p- and s-components of reflected light. For comparison, a thin Au film (traditional sensor for surface plasmon resonance (SPR)) was examined as well. The curve ∆(θ) for all the samples investigated falls down with increasing angle of light incidence, while ψ(θ) changes relatively weakly. It has been ascertained that the increase in the thickness of the HfO₂ layer affects the tan(ψ) value, while tan(ψ) deviation is mainly determined by the type of metallic film. With the growth of the HfO₂ layer, the minimum position of tan(ψ) shifts to smaller angles. From these angular dependences, one could choose the appropriate SPR-compatible structure due to the maximal deviation of tan(ψ). To optimize layer thickness for a high SPR-response, spectral measurements and additional calculations are required.
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| first_indexed | 2026-03-23T18:47:25Z |
| format | Article |
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| id | nasplib_isofts_kiev_ua-123456789-215317 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2026-03-23T18:47:25Z |
| publishDate | 2018 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Yampolskiy, A.L. Makarenko, O.V. Poperenko, L.V. Lysiuk, V.O. 2026-03-12T08:53:24Z 2018 Ellipsometry of hybrid noble metal-dielectric nanostructures / A.L. Yampolskiy, O.V. Makarenko, L.V. Poperenko, V.O. Lysiuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2018. — Т. 21, № 4. — С. 412-416. — Бібліогр.: 16 назв. — англ. 1560-8034 PACS: 73.20.mf, 72.20.-e https://nasplib.isofts.kiev.ua/handle/123456789/215317 https://doi.org/10.15407/spqeo21.04.412 Angular ellipsometric measurements of thin Ag and Cu films covered by a HfO₂ protective layer were performed. The ellipsometric parameters ψ and ∆ were measured in θ = 43°…85° light incidence angle range, where ψ is the azimuth of restored linear polarization, ∆ and is the phase shift between p- and s-components of reflected light. For comparison, a thin Au film (traditional sensor for surface plasmon resonance (SPR)) was examined as well. The curve ∆(θ) for all the samples investigated falls down with increasing angle of light incidence, while ψ(θ) changes relatively weakly. It has been ascertained that the increase in the thickness of the HfO₂ layer affects the tan(ψ) value, while tan(ψ) deviation is mainly determined by the type of metallic film. With the growth of the HfO₂ layer, the minimum position of tan(ψ) shifts to smaller angles. From these angular dependences, one could choose the appropriate SPR-compatible structure due to the maximal deviation of tan(ψ). To optimize layer thickness for a high SPR-response, spectral measurements and additional calculations are required. The authors would like to thank Dr. V.G. Kravets (University of Manchester, UK) for his kindness and helpful discussion on SPR-sensors and multilayer heterostructures ellipsometry. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Optics Ellipsometry of hybrid noble metal-dielectric nanostructures Article published earlier |
| spellingShingle | Ellipsometry of hybrid noble metal-dielectric nanostructures Yampolskiy, A.L. Makarenko, O.V. Poperenko, L.V. Lysiuk, V.O. Optics |
| title | Ellipsometry of hybrid noble metal-dielectric nanostructures |
| title_full | Ellipsometry of hybrid noble metal-dielectric nanostructures |
| title_fullStr | Ellipsometry of hybrid noble metal-dielectric nanostructures |
| title_full_unstemmed | Ellipsometry of hybrid noble metal-dielectric nanostructures |
| title_short | Ellipsometry of hybrid noble metal-dielectric nanostructures |
| title_sort | ellipsometry of hybrid noble metal-dielectric nanostructures |
| topic | Optics |
| topic_facet | Optics |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/215317 |
| work_keys_str_mv | AT yampolskiyal ellipsometryofhybridnoblemetaldielectricnanostructures AT makarenkoov ellipsometryofhybridnoblemetaldielectricnanostructures AT poperenkolv ellipsometryofhybridnoblemetaldielectricnanostructures AT lysiukvo ellipsometryofhybridnoblemetaldielectricnanostructures |