Method for data processing in application to ohmic contacts

The method of processing the data of electrophysical investigations of ohmic contacts has been developed. It allows obtaining more accurate results of measuring the contact resistance and additional information by analyzing the statistical and spatial distribution of input data. To test the method,...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2019
Hauptverfasser: Belyaev, A.E., Boltovets, N.S., Konakova, R.V., Kovtonjuk, V.M., Kudryk, Ya.Ya., Shynkarenko, V.V., Dub, M.M., Saj, P.O., Novitskii, S.V.
Format: Artikel
Sprache:Englisch
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2019
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Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/215433
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Zitieren:Method for data processing in application to ohmic contacts / A.E. Belyaev, N.S. Boltovets, R.V. Konakova, V.M. Kovtonjuk, Ya.Ya. Kudryk, V.V. Shynkarenko, M.M. Dub, P.O. Saj, S.V. Novitskii // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2019. — Т. 22, № 1. — С. 11-18. — Бібліогр.: 11 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Belyaev, A.E.
Boltovets, N.S.
Konakova, R.V.
Kovtonjuk, V.M.
Kudryk, Ya.Ya.
Shynkarenko, V.V.
Dub, M.M.
Saj, P.O.
Novitskii, S.V.
author_facet Belyaev, A.E.
Boltovets, N.S.
Konakova, R.V.
Kovtonjuk, V.M.
Kudryk, Ya.Ya.
Shynkarenko, V.V.
Dub, M.M.
Saj, P.O.
Novitskii, S.V.
citation_txt Method for data processing in application to ohmic contacts / A.E. Belyaev, N.S. Boltovets, R.V. Konakova, V.M. Kovtonjuk, Ya.Ya. Kudryk, V.V. Shynkarenko, M.M. Dub, P.O. Saj, S.V. Novitskii // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2019. — Т. 22, № 1. — С. 11-18. — Бібліогр.: 11 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description The method of processing the data of electrophysical investigations of ohmic contacts has been developed. It allows obtaining more accurate results of measuring the contact resistance and additional information by analyzing the statistical and spatial distribution of input data. To test the method, the Au–Ge–TiB₂–Au contact to n-n⁺-GaAs was used. The analysis of frequency distribution for the total resistance, specific contact resistance, and surface resistance of the semiconductor has been carried out. The spatial distribution of these parameters has been analyzed. By taking the linear gradient of specific resistivity into account, the value of the contact resistance has been clarified. We have achieved a reduction of half-width of the distribution by 14%, that is, a reduction of the error in determining the contact resistance. The method has been developed for correctly analyzing the impacts of technological treatments and degradation processes and has been oriented towards research purposes. Evaluation of the gradient distributions of the contact resistance and the resistance of the semiconductor can be used to identify the defects in the technological processes of manufacturing devices.
first_indexed 2026-03-23T19:02:29Z
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publishDate 2019
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Belyaev, A.E.
Boltovets, N.S.
Konakova, R.V.
Kovtonjuk, V.M.
Kudryk, Ya.Ya.
Shynkarenko, V.V.
Dub, M.M.
Saj, P.O.
Novitskii, S.V.
2026-03-16T11:01:50Z
2019
Method for data processing in application to ohmic contacts / A.E. Belyaev, N.S. Boltovets, R.V. Konakova, V.M. Kovtonjuk, Ya.Ya. Kudryk, V.V. Shynkarenko, M.M. Dub, P.O. Saj, S.V. Novitskii // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2019. — Т. 22, № 1. — С. 11-18. — Бібліогр.: 11 назв. — англ.
1560-8034
PACS: 73.40.Ns, 85.30.Kk
https://nasplib.isofts.kiev.ua/handle/123456789/215433
https://doi.org/10.15407/spqeo22.01.11
The method of processing the data of electrophysical investigations of ohmic contacts has been developed. It allows obtaining more accurate results of measuring the contact resistance and additional information by analyzing the statistical and spatial distribution of input data. To test the method, the Au–Ge–TiB₂–Au contact to n-n⁺-GaAs was used. The analysis of frequency distribution for the total resistance, specific contact resistance, and surface resistance of the semiconductor has been carried out. The spatial distribution of these parameters has been analyzed. By taking the linear gradient of specific resistivity into account, the value of the contact resistance has been clarified. We have achieved a reduction of half-width of the distribution by 14%, that is, a reduction of the error in determining the contact resistance. The method has been developed for correctly analyzing the impacts of technological treatments and degradation processes and has been oriented towards research purposes. Evaluation of the gradient distributions of the contact resistance and the resistance of the semiconductor can be used to identify the defects in the technological processes of manufacturing devices.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Semiconductor physics
Method for data processing in application to ohmic contacts
Article
published earlier
spellingShingle Method for data processing in application to ohmic contacts
Belyaev, A.E.
Boltovets, N.S.
Konakova, R.V.
Kovtonjuk, V.M.
Kudryk, Ya.Ya.
Shynkarenko, V.V.
Dub, M.M.
Saj, P.O.
Novitskii, S.V.
Semiconductor physics
title Method for data processing in application to ohmic contacts
title_full Method for data processing in application to ohmic contacts
title_fullStr Method for data processing in application to ohmic contacts
title_full_unstemmed Method for data processing in application to ohmic contacts
title_short Method for data processing in application to ohmic contacts
title_sort method for data processing in application to ohmic contacts
topic Semiconductor physics
topic_facet Semiconductor physics
url https://nasplib.isofts.kiev.ua/handle/123456789/215433
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