Моделювання радiацiйних та релаксацiйних процесiв в iмплантованих iонами кисню плiвках залiзоiтрiєвого гранату
The mechanisms of the formation of defects in superficial layers of epitaxial yttrium iron garnet films during the implantation by oxygen ions (E = 90 keV) are investigated by mathematical modeling methods. Secondary implantation processes and the evolution of the cascade collisions of target atoms...
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| Date: | 2008 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
Видавничий дім "Академперіодика" НАН України
2008
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/5732 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Моделювання радiацiйних та релаксацiйних процесiв в iмплантованих iонами кисню плiвках залiзоiтрiєвого гранату / Б.К. Остафiйчук, В.М. Ткачук, О.М. Ткачук, В.М. Пилипiв, О.О. Григорук // Доп. НАН України. — 2008. — № 7. — С. 82-85. — Бібліогр.: 7 назв. — укр. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | The mechanisms of the formation of defects in superficial layers of epitaxial yttrium iron garnet films during the implantation by oxygen ions (E = 90 keV) are investigated by mathematical modeling methods. Secondary implantation processes and the evolution of the cascade collisions of target atoms up to a thermodynamical equilibrium state are studied.
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| ISSN: | 1025-6415 |