Structural, optical, and electrical properties of ZnO: al prepared by CVD

In this paper we will prepared thin films from transparent conductive oxide(TCO) ZnO pure, and doped for various concentration of aluminum (4,8%) using technique chemical vapor deposition (CVD) at different substrates temperatures (400, 450, 500 °C) on glass substrates. The films were characterized...

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Veröffentlicht in:Физическая инженерия поверхности
Datum:2011
Hauptverfasser: Pogrebnyak, A.D., Jamil, N.Y., Muhammed, A.K.M.
Format: Artikel
Sprache:English
Veröffentlicht: Науковий фізико-технологічний центр МОН та НАН України 2011
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/76893
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Structural, optical, and electrical properties of ZnO: al prepared by CVD / A.D. Pogrebnyak, N.Y. Jamil, A.K.M. Muhammed // Физическая инженерия поверхности. — 2011. — Т. 9, № 3. — С. 244–249. — Бібліогр.: 5 назв. — англ.

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