ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate
Electrical and optical properties of ZnO:Al films deposited on unheated glass substrate by non-reactive RF magnetron sputtering of target ZnO:Al₂O₃ (98/2 wt.%) were studied. It was shown that Zno:Al films with the thickness of 0.75 µm deposited at the magnetron power 130 W and 4 µbar argon pressure...
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| Veröffentlicht in: | Вопросы атомной науки и техники |
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| Datum: | 2000 |
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| Format: | Artikel |
| Sprache: | Englisch |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/78239 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate / B.Т. Boyko, G.S. Khrypunov, G.V. Yurchenko // Вопросы атомной науки и техники. — 2000. — № 5. — С. 91-93. — Бібліогр.: 10 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862692373115437056 |
|---|---|
| author | Boyko, B.Т. Khrypunov, G.S. Yurchenko, G.V. |
| author_facet | Boyko, B.Т. Khrypunov, G.S. Yurchenko, G.V. |
| citation_txt | ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate / B.Т. Boyko, G.S. Khrypunov, G.V. Yurchenko // Вопросы атомной науки и техники. — 2000. — № 5. — С. 91-93. — Бібліогр.: 10 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | Electrical and optical properties of ZnO:Al films deposited on unheated glass substrate by non-reactive RF magnetron sputtering of target ZnO:Al₂O₃ (98/2 wt.%) were studied. It was shown that Zno:Al films with the thickness of 0.75 µm deposited at the magnetron power 130 W and 4 µbar argon pressure with adding of 4·10⁻³ µbar oxygen pressure during the first minute of condensation has the following electrical and optical characteristics: surface, resistance 6 Ω/ and transmittance in visible spectral range about 88%. The ZnO:Al films with such optical and electrical parameters are suitable for substrate configuration highly efficiency thin film solar cells on CuInSe₂ base.
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| first_indexed | 2025-12-07T16:17:47Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-78239 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T16:17:47Z |
| publishDate | 2000 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Boyko, B.Т. Khrypunov, G.S. Yurchenko, G.V. 2015-03-13T06:42:36Z 2015-03-13T06:42:36Z 2000 ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate / B.Т. Boyko, G.S. Khrypunov, G.V. Yurchenko // Вопросы атомной науки и техники. — 2000. — № 5. — С. 91-93. — Бібліогр.: 10 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/78239 537. 221:537.221 Electrical and optical properties of ZnO:Al films deposited on unheated glass substrate by non-reactive RF magnetron sputtering of target ZnO:Al₂O₃ (98/2 wt.%) were studied. It was shown that Zno:Al films with the thickness of 0.75 µm deposited at the magnetron power 130 W and 4 µbar argon pressure with adding of 4·10⁻³ µbar oxygen pressure during the first minute of condensation has the following electrical and optical characteristics: surface, resistance 6 Ω/ and transmittance in visible spectral range about 88%. The ZnO:Al films with such optical and electrical parameters are suitable for substrate configuration highly efficiency thin film solar cells on CuInSe₂ base. This work has been supported by the INTAS-96-0206 Project of European Commission and 7IP 050129 Project of Swiss National Science Foundation. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Пленочные материалы и покрытия ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate Article published earlier |
| spellingShingle | ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate Boyko, B.Т. Khrypunov, G.S. Yurchenko, G.V. Пленочные материалы и покрытия |
| title | ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate |
| title_full | ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate |
| title_fullStr | ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate |
| title_full_unstemmed | ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate |
| title_short | ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate |
| title_sort | zno:al wide zone “windows” deposited by magnetron sputtering on unheated substrate |
| topic | Пленочные материалы и покрытия |
| topic_facet | Пленочные материалы и покрытия |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/78239 |
| work_keys_str_mv | AT boykobt znoalwidezonewindowsdepositedbymagnetronsputteringonunheatedsubstrate AT khrypunovgs znoalwidezonewindowsdepositedbymagnetronsputteringonunheatedsubstrate AT yurchenkogv znoalwidezonewindowsdepositedbymagnetronsputteringonunheatedsubstrate |