Generating of low energy intensive ion streams in conditions of low pressure

• Published in: Вопросы атомной науки и техники
• Date: 2000
• Main Authors: Zinoviev, D.V., Tseluyko, A.F., Chunadra, A.G., Yunakov, N.N.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2000
• Subjects: Plasma dynamics and plasma-wall interaction
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/78537
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Generating of low energy intensive ion streams in conditions of low pressure / D.V. Zinoviev, A.F. Tseluyko, A.G. Chunadra, N.N. Yunakov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 103-105. — Бібліогр.: 3 назв. — англ.

In the work the method of forming of low energy ion streams near the sample surface with separating the generation area of plasma and the acceleration area of ion is offered. It allows to lower pressure in acceleration area essentially (0.01 Pa and below). The separating of the areas takes place at the expense of vacuum resistance in a plasma generating device. The dependence of plasma parameters on exterior parameters of the device is determined and the way of the further decreasing of working pressure in the modification area up to 10⁻³ – 10⁻⁴ Pa are shown.