Technological accelerator with closed electron drift for surface treatment

• Published in: Вопросы атомной науки и техники
• Date: 2000
• Main Authors: Goncharov, A.A., Dobrovolskii, A.M., Pavlov, S.N., Panchenko, O.A., Protsenko, I.M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2000
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/78561
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Technological accelerator with closed electron drift for surface treatment / A.A. Goncharov, A.M. Dobrovolskii, S.N. Pavlov, O.A. Panchenko, I.M. Protsenko // Вопросы атомной науки и техники. — 2000. — № 6. — С. 160-162. — Бібліогр.: 3 назв. — англ.

Now the technologies of functional covers deriving on large surfaces intensively are developed. For these purposes the plasma sputtering systems of magnetron, vacuum - arc, electron -beam and other types are effectively used. The quality of cover largely depends on preliminary treatment of a surface...