Installation for gas-phase deposition of materials
The installation for gas-phase deposition of materials is developed. Gas- dynamic parameters of a vapor-gas mixture flow in the reaction volume by flow-around of the surface being coated are evaluated. The processes of tungsten and boron carbide deposition are investigated.
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| Date: | 2004 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2004
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/79080 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Installation for gas-phase deposition of materials / Yu.F.Lonin, Yu.O.Pilipets, N.A.Khovansky, V.I.Sheremet, B.M.Shirokov // Вопросы атомной науки и техники. — 2004. — № 1. — С. 221-222. — Бібліогр.: 3 назв. — англ. |