The synthesis of TiAlN composites by condensation of the different arc plasma flows

• Published in: Вопросы атомной науки и техники
• Date: 2005
• Main Authors: Taran, V.S., Tereshin, V.I., Timoshenko, A.I., Chechel’nitskij, O.G., Kryshtal’, A.P.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2005
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/79156
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The synthesis of TiAlN composites by condensation of the different arc plasma flows / V.S. Taran, V.I. Tereshin, A.I. Timoshenko, O.G. Chechel’nitskij, A.P. Kryshtal’ // Вопросы атомной науки и техники. — 2005. — № 1. — С. 184-186. — Бібліогр.: 5 назв. — англ.

Some properties of the arc-vapour deposited TiAlN films, obtained both – by condensation of the different and combined titanium and aluminium plasma flows, have been investigated. The different flows was provided by two arc evaporators with titanium and aluminium cathodes, at that, the aluminium pla...