Magnetically filtered vacuum-arc plasma deposition systems
This article is a brief historical review of R&D carried out by the KIPT scientists in the field of magnetic filtering of vacuum-arc plasma flows to be applied in thin film deposition technology.
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2002 |
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2002
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/79281 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Magnetically filtered vacuum-arc plasma deposition systems / I.I. Aksenov // Вопросы атомной науки и техники. — 2002. — № 5. — С. 139-141. — Бібліогр.: 26 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862565900222201856 |
|---|---|
| author | Aksenov, I.I. |
| author_facet | Aksenov, I.I. |
| citation_txt | Magnetically filtered vacuum-arc plasma deposition systems / I.I. Aksenov // Вопросы атомной науки и техники. — 2002. — № 5. — С. 139-141. — Бібліогр.: 26 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | This article is a brief historical review of R&D carried out by the KIPT scientists in the field of magnetic filtering of vacuum-arc plasma flows to be applied in thin film deposition technology.
|
| first_indexed | 2025-11-26T00:09:48Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-79281 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-11-26T00:09:48Z |
| publishDate | 2002 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Aksenov, I.I. 2015-03-30T09:23:13Z 2015-03-30T09:23:13Z 2002 Magnetically filtered vacuum-arc plasma deposition systems / I.I. Aksenov // Вопросы атомной науки и техники. — 2002. — № 5. — С. 139-141. — Бібліогр.: 26 назв. — англ. 1562-6016 PACS: 52.77.-j https://nasplib.isofts.kiev.ua/handle/123456789/79281 This article is a brief historical review of R&D carried out by the KIPT scientists in the field of magnetic filtering of vacuum-arc plasma flows to be applied in thin film deposition technology. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low temperature plasma and plasma technologies Magnetically filtered vacuum-arc plasma deposition systems Article published earlier |
| spellingShingle | Magnetically filtered vacuum-arc plasma deposition systems Aksenov, I.I. Low temperature plasma and plasma technologies |
| title | Magnetically filtered vacuum-arc plasma deposition systems |
| title_full | Magnetically filtered vacuum-arc plasma deposition systems |
| title_fullStr | Magnetically filtered vacuum-arc plasma deposition systems |
| title_full_unstemmed | Magnetically filtered vacuum-arc plasma deposition systems |
| title_short | Magnetically filtered vacuum-arc plasma deposition systems |
| title_sort | magnetically filtered vacuum-arc plasma deposition systems |
| topic | Low temperature plasma and plasma technologies |
| topic_facet | Low temperature plasma and plasma technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/79281 |
| work_keys_str_mv | AT aksenovii magneticallyfilteredvacuumarcplasmadepositionsystems |