Magnetically filtered vacuum-arc plasma deposition systems
This article is a brief historical review of R&D carried out by the KIPT scientists in the field of magnetic filtering of vacuum-arc plasma flows to be applied in thin film deposition technology.
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2002 |
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2002
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/79281 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Magnetically filtered vacuum-arc plasma deposition systems / I.I. Aksenov // Вопросы атомной науки и техники. — 2002. — № 5. — С. 139-141. — Бібліогр.: 26 назв. — англ. |