Solid ion accelerator based on magnetron sputtering discharge
A new solid ion accelerator based on magnetron sputtering discharge is described. The ions of working gas are
 used to bombard and sputter a cylindrical target made of metal or dielectric material. The sputtered atoms can be
 ionized and extracted by an ion optical accelerating syste...
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| Published in: | Вопросы атомной науки и техники |
|---|---|
| Date: | 2004 |
| Main Authors: | Azarenkov, N.A., Bizyukov, I.A., Kashaba, A.Y., Sereda, K.N. |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2004
|
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/79362 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Solid ion accelerator based on magnetron sputtering discharge / N.A. Azarenkov, I.A. Bizyukov, A.Y. Kashaba, K.N. Sereda // Вопросы атомной науки и техники. — 2004. — № 2. — С. 114-116. — Бібліогр.: 5 назв. — англ. |
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