The flow density of atoms sputtered from a cathode of cylinder magnetron

• Published in: Вопросы атомной науки и техники
• Date: 2005
• Main Authors: Panchenko, O.A., Goncharov, A.A., Demchishin, A.V., Kostin, E.G., Pavlov, S.N., Stetsenko, B.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2005
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/79777
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The flow density of atoms sputtered from a cathode of cylinder magnetron / O.A. Panchenko, A.A. Goncharov, A.V. Demchishin, E.G. Kostin, S.N. Pavlov, B.V. Stetsenko // Вопросы атомной науки и техники. — 2005. — № 2. — С. 170-172. — Бібліогр.: 9 назв. — англ.

The results of calculations of atom flows, sputtered from a cathode of special cylindrical magnetron sputtering system, presented. The atoms flow in cylinder magnetron will be larger with respect to planar magnetron due to the axial symmetry of the system. It is shown that deposition rate weakly dep...