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The influence of a DC electric field on the radio-frequency microdischarge

The dependence of ionization frequency in a stationary radio-frequency microdischarge on plasma density and DC voltage applied to the discharge plasma is found. Calculation is fulfilled for a plane geometry in assumption of uniformity of radio-frequency electric field. Розрахована залежність частоти...

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Bibliographic Details
Published in:	Вопросы атомной науки и техники
Date:	2005
Main Author:	Bogatov, N.A.
Format:	Article
Language:	English
Published:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2005
Subjects:	Low temperature plasma and plasma technologies
Online Access:	https://nasplib.isofts.kiev.ua/handle/123456789/79798
Tags:	Add Tag No Tags, Be the first to tag this record!
Journal Title:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:	The influence of a DC electric field on the radio-frequency microdischarge / N.A. Bogatov // Вопросы атомной науки и техники. — 2005. — № 2. — С. 191-193. — Бібліогр.: 5 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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