RF discharge in argon with cylindrical dust particles

• Published in: Вопросы атомной науки и техники
• Date: 2005
• Main Authors: Chutov, Yu.I., Goedheer, W.J., Kravchenko, O.Yu., Levada, G.I., Lisitchenko, T.E., Romanenko, R.O.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2005
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/79801
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: RF discharge in argon with cylindrical dust particles / Yu.I. Chutov, W.J. Goedheer, O.Yu. Kravchenko, G.I. Levada, T.E. Lisitchenko, R.O. Romanenko // Вопросы атомной науки и техники. — 2005. — № 2. — С. 194-196. — Бібліогр.: 5 назв. — англ.

Kinetic computer simulations of the low pressure RF discharge in argon with cylindrical and spherical dust particles are carried out using PIC/MCC method. The Monte Carlo technique is used to describe electron and ion collisions with neutral atoms, ions, and dust particles. Obtained results show the...