Features of high-current pulsed regimes in regimes in magnetron sputtering systems

• Published in: Вопросы атомной науки и техники
• Date: 2005
• Main Authors: Bizyukov, A.A., Kashaba, A.Ye., Romashchenko, E.V., Sereda, K.N., Tarasov, I.K., Abolmasov, S.N.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2005
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/79809
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Features of high-current pulsed regimes in regimes in magnetron sputtering systems / A.A. Bizyukov, A.Ye. Kashaba, E.V. Romashchenko, K.N. Sereda, I.K. Tarasov, S.N. Abolmasov // Вопросы атомной науки и техники. — 2005. — № 2. — С. 167-169. — Бібліогр.: 4 назв. — англ.

The high-current pulsed magnetron sputtering system is presented and its operation regimes are studied. The comparative technological trials of the system are carried out at various types of the discharge: stationary magnetron, pulsed magnetron and pulsed arc. A procedure of calculation of dynamics...