Structure and stress state of TiN and Ti₀.₅₋xAl₀.₅YxN coatings prepared by the PIII&D technique from filtered vacuum-arc plasma

• Published in: Вопросы атомной науки и техники
• Date: 2014
• Main Author: Reshetnyak, E.N.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2014
• Subjects: Физика и технология конструкционных материалов
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/79928
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Structure and stress state of TiN and Ti₀.₅₋xAl₀.₅YxN coatings prepared by the PIII&D technique from filtered vacuum-arc plasma/ E.N. Reshetnyak // Вопросы атомной науки и техники. — 2014. — № 1. — С. 159-162. — Бібліогр.: 17 назв. — анг.

The results of investigations of the structure and stress state of TiN and Ti₀.₅₋xAl₀.₅YxN coatings deposited from the filtered vacuum-arc plasma under high voltage pulsed bias potential on the substrate are presented. It was found that axial texture [110] is formed in coatings when pulses potential...