High-productive source of the cathodic vacuum-arc plasma with the rectilinear filter
The design and performance of high productive cathodic vacuum arc plasma source with rectilinear “magnetic island” filter, which is suitable for industrial applications, are briefly described. The device is characterized by achievable output ion current up to 4 A at an arc current of 100 A, Ti coa...
Saved in:
| Published in: | Вопросы атомной науки и техники |
|---|---|
| Date: | 2013-10-23 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
National Science Centеr “Kharkov Institute of Physics and Technology”, Kharkov, Ukraine
2013-10-23
|
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/79933 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | High-productive source of the cathodic vacuum-arc plasma with the rectilinear filter / V.V. Vasylyev, A.A. Luchaninov, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2014. — № 1. — С. 97-100. — Бібліогр.: 8 назв. — англ. |