Ion kinetics in an ECR plasma source
In plasma reactors it is extremely important the study for achieving greater control of critical parameters such as the flux velocities and the energy distribution of ions. These quantities are functions of the reactor physical dimensions, magnetic field profile as well as the kinetic chemical react...
Gespeichert in:
| Veröffentlicht in: | Вопросы атомной науки и техники |
|---|---|
| Datum: | 2002 |
| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2002
|
| Schlagworte: | |
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/80327 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Ion kinetics in an ECR plasma source / C. Gutiérrez-Tapia // Вопросы атомной науки и техники. — 2002. — № 4. — С. 170-172. — Бібліогр.: 5 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862546694535643136 |
|---|---|
| author | Gutiérrez-Tapia, C. |
| author_facet | Gutiérrez-Tapia, C. |
| citation_txt | Ion kinetics in an ECR plasma source / C. Gutiérrez-Tapia // Вопросы атомной науки и техники. — 2002. — № 4. — С. 170-172. — Бібліогр.: 5 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | In plasma reactors it is extremely important the study for achieving greater control of critical parameters such as the flux velocities and the energy distribution of ions. These quantities are functions of the reactor physical dimensions, magnetic field profile as well as the kinetic chemical reactions occurring in the discharge. In this work, a model previously reported in [1] is improved. In that model using the drift kinetic equation approach the axial and radial ion fluxes at processing zone of an ECR plasma source are calculated. Now, the ionization rates are calculated from the energy distribution function obtained by a regularization method and using the experimental data of the electric probe measurements. Also, a more exact calculation of the external magnetic field is included.
|
| first_indexed | 2025-11-25T14:07:32Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-80327 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-11-25T14:07:32Z |
| publishDate | 2002 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Gutiérrez-Tapia, C. 2015-04-14T18:31:52Z 2015-04-14T18:31:52Z 2002 Ion kinetics in an ECR plasma source / C. Gutiérrez-Tapia // Вопросы атомной науки и техники. — 2002. — № 4. — С. 170-172. — Бібліогр.: 5 назв. — англ. 1562-6016 PACS: 52.50.-b https://nasplib.isofts.kiev.ua/handle/123456789/80327 In plasma reactors it is extremely important the study for achieving greater control of critical parameters such as the flux velocities and the energy distribution of ions. These quantities are functions of the reactor physical dimensions, magnetic field profile as well as the kinetic chemical reactions occurring in the discharge. In this work, a model previously reported in [1] is improved. In that model using the drift kinetic equation approach the axial and radial ion fluxes at processing zone of an ECR plasma source are calculated. Now, the ionization rates are calculated from the energy distribution function obtained by a regularization method and using the experimental data of the electric probe measurements. Also, a more exact calculation of the external magnetic field is included. This work was patially supported by project CONACyT 33873-E en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low temperature plasma and plasma technologies Ion kinetics in an ECR plasma source Article published earlier |
| spellingShingle | Ion kinetics in an ECR plasma source Gutiérrez-Tapia, C. Low temperature plasma and plasma technologies |
| title | Ion kinetics in an ECR plasma source |
| title_full | Ion kinetics in an ECR plasma source |
| title_fullStr | Ion kinetics in an ECR plasma source |
| title_full_unstemmed | Ion kinetics in an ECR plasma source |
| title_short | Ion kinetics in an ECR plasma source |
| title_sort | ion kinetics in an ecr plasma source |
| topic | Low temperature plasma and plasma technologies |
| topic_facet | Low temperature plasma and plasma technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/80327 |
| work_keys_str_mv | AT gutierreztapiac ionkineticsinanecrplasmasource |