Ion kinetics in an ECR plasma source

• Published in: Вопросы атомной науки и техники
• Date: 2002
• Main Author: Gutiérrez-Tapia, C.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2002
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/80327
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Ion kinetics in an ECR plasma source / C. Gutiérrez-Tapia // Вопросы атомной науки и техники. — 2002. — № 4. — С. 170-172. — Бібліогр.: 5 назв. — англ.

In plasma reactors it is extremely important the study for achieving greater control of critical parameters such as the flux velocities and the energy distribution of ions. These quantities are functions of the reactor physical dimensions, magnetic field profile as well as the kinetic chemical react...