APA (7th ed.) Citation

Manuilenko, O., & Minaeva, K. (2006). Ion energy and angular distributions in RF capacitively coupled plasma sources. Вопросы атомной науки и техники.

Chicago Style (17th ed.) Citation

Manuilenko, O.V, and K.M Minaeva. "Ion Energy and Angular Distributions in RF Capacitively Coupled Plasma Sources." Вопросы атомной науки и техники 2006.

MLA (8th ed.) Citation

Manuilenko, O.V, and K.M Minaeva. "Ion Energy and Angular Distributions in RF Capacitively Coupled Plasma Sources." Вопросы атомной науки и техники, 2006.

Warning: These citations may not always be 100% accurate.