Cover Image

Ion energy and angular distributions in RF capacitively coupled plasma sources

The possibilities to control ion energy distribution functions (IEDFs) and ion angle distribution functions (IADFs) on electrodes in single- and dualfrequency capacitively coupled plasma (CCP) sources are investigated by means of particle-in-cell/Monte Carlo (PIC/MCC) simulations....

Full description

Saved in:

Bibliographic Details
Published in:	Вопросы атомной науки и техники
Date:	2006
Main Authors:	Manuilenko, O.V., Minaeva, K.M.
Format:	Article
Language:	English
Published:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2006
Subjects:	Газовый разряд, плазменно-пучковый разряд
Online Access:	https://nasplib.isofts.kiev.ua/handle/123456789/81155
Tags:	Add Tag No Tags, Be the first to tag this record!
Journal Title:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:	Ion energy and angular distributions in RF capacitively coupled plasma sources / O.V. Manuilenko, K.M. Minaeva // Вопросы атомной науки и техники. — 2006. — № 5. — С. 116-121. — Бібліогр.: 16 назв. — англ.

Institution

Digital Library of Periodicals of National Academy of Sciences of Ukraine

Similar Items

Weak ion sound turbulence and isotope anomaly in electron cyclotron resonance ion source plasmas
by: Ivanov, A.A., et al.
Published: (2006)

Ion flows from area of beam plasma discharge at low magnetic field – physics and application
by: Isaev, N.V., et al.
Published: (2006)

Floating potential of dielectric target in plasma-beam discharge with magnet field
by: Dobrovol`s`kii, A.M., et al.
Published: (2006)

Calculation of DC arc plasma torch voltage-current characteristics based on Steenbeck model
by: Gnedenko, V.G., et al.
Published: (2006)

Influence of secondary electron emission on the RF gas breakdown
by: Dakhov, A.N., et al.
Published: (2013)

Применение разрядов в парах испаряемых металлов для осаждения плёнок из ионизированного потока
by: Костин, Е.Г.
Published: (2006)

Ускорение ионов, электронов и рентгеновское излучение в катодном пятне вакуумной дуги
by: Андреев, А.А.
Published: (2006)

Получение отрицательных ионов водорода в пучково-плазменном разряде
by: Баранов, А.E., et al.
Published: (2006)

Влияние электроотрицательных примесей на разряд атмосферного давления в N₂-O₂
by: Голота, В.И., et al.
Published: (2006)

Компонентный состав активных частиц в объемном барьерном разряде на сухом (относительная влажность RH ≈ 20%) и влажном (RH ≈ 80%) воздухе
by: Солошенко, И.А., et al.
Published: (2006)

Взаимодействие высокочастотных электрических полей с дрейфовым электронным потоком в разряде с поперечным магнитным полем
by: Бизюков, А.А., et al.
Published: (2006)

Повышение эффективности синтеза озона в системе электродов игла-плоскость с импульсным питанием
by: Голота, В.И., et al.
Published: (2006)

Статистический анализ капельной фракции взрывоэмиссионного катода
by: Коляда, Ю.Е., et al.
Published: (2006)

Activated hydrogen influence on characteristics of penning discharge with hollow cathode
by: Borisko, V.N., et al.
Published: (2006)

Испарение макрочастиц в плазме сильноточного импульсного дугового разряда низкого давления
by: Бизюков, А.А., et al.
Published: (2006)

Про параметри катодоспрямованого стримеру
by: Остроушко, В.М., et al.
Published: (2006)

Сomputer simulation of positive streamer dynamics in uniform and non-uniform electric fields in air
by: Manuilenko, O.V.
Published: (2013)

Peculiarities of glow modes of argon atmospheric pressure radio-frequency capacitive discharge with isolated electrodes
by: Bazhenov, V.Yu., et al.
Published: (2013)

Decomposition of ethelene in low temperature plasma of barrierless discharge
by: Golota, V.I., et al.
Published: (2018)

Numerical simulation of negative streamers in strong non-uniform electric fields in nitrogen. Effect of needle radius and applied voltage on streamer velocity
by: Manuilenko, O.V., et al.
Published: (2013)

The properties of plasma-liquid system with one liquid electrode
by: Nedybaliuk, O.A., et al.
Published: (2013)

Plasma system with rotational gliding arc between solid electrodes
by: Solomenko, O.V., et al.
Published: (2013)

Positive ion motion in cathode sheath of glow discharge in N₂O
by: Lisovskiy, V.A., et al.
Published: (2013)

Reforming of ethanol in hybrid plasma catalytic system
by: Nedybaliuk, O.A., et al.
Published: (2018)

Spectroscopy pequliarities of thermal plasma with copper and nickel vapours
by: Veklich, A.N., et al.
Published: (2015)

The influence of exothermic reactions on the nonequilibrium level of discharge plasma
by: Chernyak, V.Ya., et al.
Published: (2013)

Іgnition of the beam-plasma discharge in the initially neitral gas
by: Dadyka, D.I., et al.
Published: (2018)

Mathematical modeling of gas flow in plasma torch vortex chamber
by: Butyrev, A.E., et al.
Published: (2008)

Investigation of electric ARC plasma between composite Cu–C electrodes
by: Veklich, A.N., et al.
Published: (2013)

Kinetic processes in negative glow plasma of low pressure discharge in oxygen
by: Tsiolko, V.V., et al.
Published: (2013)

Еlectrodes dimensions effect on the self-sustained plasma-beam discharge power
by: Hrechko, Ya.O., et al.
Published: (2018)

Іnvestigation of plasma of arc discharge between melting Cu- and Ni-electrodes
by: Kleshich, M.M., et al.
Published: (2018)

Sample estimation of distribution parameters if upper and lower bounds of random variable are known
by: Barannik, V.O.
Published: (2015)

Plasma’s kinetics in discharge in mixture of air, water and ethanol steams and the questions of alternative fuel
by: Shchedrin, A.I., et al.
Published: (2008)

Peculiarities of UV radiation from hollow cathode discharge plasma used for sterilization of medical articles
by: Tsiolko, V.V., et al.
Published: (2010)

On the dense plasma decay within the electron concentration range of 10¹⁷ cm⁻³≤Ne≤10²² cm⁻³
by: Fedorovich, О.А., et al.
Published: (2013)

Studies of microwave characteristics and plasma parameters in low pressure discharge initiated in coaxial waveguide by stochastic radiation
by: Karas, V.I., et al.
Published: (2015)

Conditions accompanying formation of long-living luminous objects from dissipating plasma of electric discharge in water
by: Golubnichy, P.I., et al.
Published: (2008)

Оzone decay in chemical reactor with the developed inner surface: air-ethylene mixture
by: Manuilenko, О.V., et al.
Published: (2018)

Dynamics of the emission spectrum of the hydrogenoxygen plasma of pulsed discharge in water in the range of the Balmer series with a minimum of impurities
by: Fedorovich, O.A., et al.
Published: (2015)