The effect of nitrogen pressure during vacuum-arc TiN coatings deposition on the erosoin resistance in plasma of magnetron type discharges

• Published in: Вопросы атомной науки и техники
• Date: 2014
• Main Authors: Glazunov, G.P., Andreev, A.A., Sobol, O.V., Bondarenko, M.N., Konotopskiy, A.L., Stolbovoy, V.A.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2014
• Subjects: Динамика плазмы и взаимодействие плазма-стенка
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/81201
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The effect of nitrogen pressure during vacuum-arc TiN coatings deposition on the erosoin resistance in plasma of magnetron type discharges / G.P. Glazunov, A.A. Andreev, O.V. Sobol’, M.N. Bondarenko, A.L. Konotopskiy, V.A. Stolbovoy // Вопросы атомной науки и техники. — 2014. — № 6. — С. 76-79. — Бібліогр.: 10 назв. — англ.

The erosion process was investigated of TiN coatings which were made with the vacuum-arc sputtering of Ti at the different nitrogen pressures (10⁻⁴…5•10⁻³ Torr). The erosion rates were measured by the weighting on analytical balance before and after treatment by plasmas of magnetron type, axial symm...