The effect of nitrogen pressure during vacuum-arc TiN coatings deposition on the erosoin resistance in plasma of magnetron type discharges
The erosion process was investigated of TiN coatings which were made with the vacuum-arc sputtering of Ti at the different nitrogen pressures (10⁻⁴…5•10⁻³ Torr). The erosion rates were measured by the weighting on analytical balance before and after treatment by plasmas of magnetron type, axial symm...
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| Veröffentlicht in: | Вопросы атомной науки и техники |
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| Datum: | 2014 |
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2014
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/81201 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | The effect of nitrogen pressure during vacuum-arc TiN coatings deposition on the erosoin resistance in plasma of magnetron type discharges / G.P. Glazunov, A.A. Andreev, O.V. Sobol’, M.N. Bondarenko, A.L. Konotopskiy, V.A. Stolbovoy // Вопросы атомной науки и техники. — 2014. — № 6. — С. 76-79. — Бібліогр.: 10 назв. — англ. |