Actinometric study of oxygen dissociation in ICP source

• Published in: Вопросы атомной науки и техники
• Date: 2014
• Main Authors: Dakhov, A.N., Dudin, S.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2014
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/81932
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Actinometric study of oxygen dissociation in ICP source / A.N. Dakhov, S.V. Dudin // Вопросы атомной науки и техники. — 2014. — № 6. — С. 167-170. — Бібліогр.: 4 назв. — англ.

Results of actinometric study of oxygen dissociation in ICP source are presented. For atomic oxygen the emission lines of 844.6 nm was chosen having low impact of dissociative excitation. Actinometer gas in the experiments was argon, with emission line of 750.4 nm. Measurements of the degree of oxyg...