Theoretical and experimental investigation of the plasma source with argon RF barrier discharge at atmospheric pressure

• Published in: Вопросы атомной науки и техники
• Date: 2014
• Main Authors: Bazhenov, V.Yu., Tsiolko, V.V., Piun, V.M., Chaplinskiy, R.Yu., Kuzmichev, A.I.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2014
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/81945
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Theoretical and experimental investigation of the plasma source with argon RF barrier discharge at atmospheric pressure / V.Yu. Bazhenov, V.V. Tsiolko, V.M. Piun, R.Yu. Chaplinskiy, A.I. Kuzmichev // Вопросы атомной науки и техники. — 2014. — № 6. — С. 137-140. — Бібліогр.: 8 назв. — англ.

Glow characteristics of capacitive radio frequency discharge with isolated electrodes in atmospheric pressure argon in low-current α and high-current γ modes are determined experimentally and calculated by the hybrid hydro-dynamic model. Comparative analysis of obtained experimental data and simulat...