Theoretical and experimental investigation of the plasma source with argon RF barrier discharge at atmospheric pressure
Glow characteristics of capacitive radio frequency discharge with isolated electrodes in atmospheric pressure argon in low-current α and high-current γ modes are determined experimentally and calculated by the hybrid hydro-dynamic model. Comparative analysis of obtained experimental data and simulat...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2014 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2014
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/81945 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Theoretical and experimental investigation of the plasma source with argon RF barrier discharge at atmospheric pressure / V.Yu. Bazhenov, V.V. Tsiolko, V.M. Piun, R.Yu. Chaplinskiy, A.I. Kuzmichev // Вопросы атомной науки и техники. — 2014. — № 6. — С. 137-140. — Бібліогр.: 8 назв. — англ. |
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