Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc
Comparative studies of the structure, mechanical and tribological properties of DLC coatings deposited in DC and DC with superimposed high current pulse modes of operation vacuum-arc plasma source with the graphite cathode are presented. Imposition the pulses of high current on DC vacuum-arc dischar...
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| Опубліковано в: : | Вопросы атомной науки и техники |
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| Дата: | 2014 |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2014
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc / V. Zavaleyev, J. Walkowicz, D.S. Aksyonov, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2014. — № 6. — С. 237-240. — Бібліогр.: 7 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859999088404070400 |
|---|---|
| author | Zavaleyev, V. Walkowicz, J. Aksyonov, D.S. Luchaninov, A.A. Reshetnyak, E.N. Strel’nitskij, V.E. |
| author_facet | Zavaleyev, V. Walkowicz, J. Aksyonov, D.S. Luchaninov, A.A. Reshetnyak, E.N. Strel’nitskij, V.E. |
| citation_txt | Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc / V. Zavaleyev, J. Walkowicz, D.S. Aksyonov, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2014. — № 6. — С. 237-240. — Бібліогр.: 7 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | Comparative studies of the structure, mechanical and tribological properties of DLC coatings deposited in DC and DC with superimposed high current pulse modes of operation vacuum-arc plasma source with the graphite cathode are presented. Imposition the pulses of high current on DC vacuum-arc discharge allows both increase the deposition rate of DLC coating and reduce the residual compressive stress in the coatings what promotes substantial improvement the adhesion to the substrate. Effect of vacuum arc plasma filtration with Venetian blind filter on the deposition rate and tribological characteristics of the coatings analyzed.
Представлены результаты сравнительных исследований структуры, механических и трибологических свойств алмазоподобных покрытий (АПП), осажденных методами разряда постоянного тока и постоянного тока с наложением дополнительных импульсов при использовании вакуумно-дугового источника плазмы с графитовым катодом. Установлено, что метод вакуумно-дугового осаждения постоянного тока с наложенными импульсами сильноточной дуги позволяет увеличить скорость осаждения АПП, снижает уровень остаточных напряжений сжатия в покрытиях, существенно улучшает адгезию к подложке и одновременно обеспечивает хорошие характеристики трения. Анализируется влияние фильтрации вакуумно-дуговой плазмы на скорость осаждения и характеристики покрытий.
Представлено результати порівняльних досліджень структури, механічних та трибологічних властивостей алмазоподібних покриттів (АПП), осаджених методами розряду постійного струму та постійного струму з накладанням додаткових імпульсів струму при використанні вакуумно-дугового джерела плазми з графітовим катодом. Встановлено, що метод вакуумно-дугового осадження постійного струму з додатковими імпульсами струму великої амплітуди дозволяє збільшити швидкість осадження АПП, знижує рівень залишкових напружень стиску в покриттях, значно поліпшує адгезію до підкладки та одночасно забезпечує добрі характеристики тертя. Аналізується вплив фільтрації вакуумно-дугової плазми на швидкість осадження та характеристики покриттів.
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| first_indexed | 2025-12-07T16:35:38Z |
| format | Article |
| fulltext |
ISSN 1562-6016. ВАНТ. 2014. №6(94)
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2014, №6. Series: Plasma Physics (20), p. 237-240. 237
PROPERTIES OF DLC COATINGS DEPOSITED BY DC AND DC WITH
SUPERIMPOSED PULSED VACUUM ARC
V. Zavaleyev
1
, J. Walkowicz
1
, D.S. Aksyonov
2
, A.A. Luchaninov
2
,
E.N. Reshetnyak
2
, V.E. Strel’nitskij
2
1
Institute of Technology and Education, Koszalin University of Technology, Koszalin, Poland;
2
NSC “Kharkov Institute of Physics and Technology”, Kharkov, Ukraine
Comparative studies of the structure, mechanical and tribological properties of DLC coatings deposited in DC
and DC with superimposed high current pulse modes of operation vacuum-arc plasma source with the graphite
cathode are presented. Imposition the pulses of high current on DC vacuum-arc discharge allows both increase the
deposition rate of DLC coating and reduce the residual compressive stress in the coatings what promotes substantial
improvement the adhesion to the substrate. Effect of vacuum arc plasma filtration with Venetian blind filter on the
deposition rate and tribological characteristics of the coatings analyzed.
PACS: 81.15.-z, 81.05.uj
INTRODUCTION
Carbon DLC (diamond-like carbon) coatings possess
unique properties: high hardness and strength, low
coefficient of friction, transparency, high thermal
conductivity, erosion, chemical and thermal stability,
biocompatibility. This leads to wide possibilities of their
application in mechanical engineering, optics,
electronics, medicine and other fields. Cathodic
vacuum-arc discharge generating a stream of highly
ionized carbon plasma is an efficient tool for deposition
the DLC coatings for various purposes [1]. However,
one disadvantage of the method is the presence of
macroparticles in the plasma flow and, consequently,
significant content of particulates (droplet fraction
emitted from the cathode) in the condensate.
The most radical means of suppressing the droplet
fraction are magnetoelectric filters [2]. But the higher
the desired degree of purification, the lower output ion
current of the filter and so lower the deposition rate. At
the same time, in many practical cases there is no need
in “ultra cleaning” of plasma. Removing the large-scale
fraction of the particulates from the bulk of the plasma
may be enough to make the film be available for
practical use.
For example, the presence of the droplets with a
particle size less than 1 micron is quite acceptable in
wear-resistant anti-friction nanostructured coatings on
working parts of friction surfaces and instruments. In
this regard, a significant practical interest the alternative
methods for particulates suppression attract which,
although not provide perfect cleaning of the plasma, but
are more simple and cheap compared to the methods
that require use of filters. One of the ways in reducing
the particulates emission is decreasing the residence
time of the cathode spot in the same place, which is
achieved in pulsed arc [1, 2]. Also DC vacuum arc
method with superimposed high-current arc pulses [3]
give good results.
The aim of the present work is comparative study of
the structure, mechanical and tribological properties of
DLC coatings fabricated using filtered and unfiltered
vacuum arc plasma in the vacuum arc source operating
both in DC mode, and DC with the imposition of high-
current pulses.
1. EXPERIMENTAL TECHNIQUES
DLC coating deposition was carried out on a
modernized industrial vacuum arc installation C55CT
made by the INOVAP GmbH. Two vacuum arc sources
with the graphite cathodes and the vacuum arc source
with the cathode of high-purity chromium, all of
diameter of 70 mm are used in the installation. Upgrade
of the setup included use of the water-cooled linear
Venetian blind filters placed in the vacuum chamber in
front of the sources of metal and carbon plasma, as well
as the montage of water-cooled electrodes for AEGD
process mode. The design of the filter has been
optimized for the best quality of filtration [3].
Samples of high-speed steel (HSS) with the
dimensions of Ø32×3 mm polished to a roughness of
Ra = 0.02 μm were used as substrates. They were
washed in acetone and alcohol in an ultrasonic bath, and
finally the samples were fixed in the chamber on the
drum type substrate holder. The rotation speed of the
substrate holder during deposition of carbon coating
was 5 turn/min. The vacuum chamber was preliminary
pumped to 1×10
-3
Pa. Argon gas (99.999 % purity) was
used to improve operation stability of the used vacuum
arc plasma sources. After preliminary cleaning of the
samples surface by Ar ions in the AEGD (Arc-
Enhanced Glow Discharge), the ion cleaning of the
surface was carried out by the accelerated Cr ions and
then the underlayer of chromium for improving
adhesion was deposited.
All stages of the process in the present experiments
were identical and differed only by the modes of
operation of the vacuum-arc sources.
Deposition modes used:
1 – nonfiltered DC vacuum-arc with arc current of
50 A with superimposed high-current arc pulses;
2 – filtered DC vacuum-arc with arc current of 50 A
with superimposed high-current arc pulses;
3 – filtered DC vacuum-arc with arc current of 50 A.
Pulse parameters for 1 and 2 pulsed modes:
amplitude of arc current pulses – 1400 A; pulse duration
– 300 μs; repetition frequency – 100 Hz.
Since the planetary substrate holder had no
additional cooling, and the temperature is one of the key
parameter which determines the DLC properties [4], in
the experiments the substrate was cooled through the
breaks of the process after the phase of adhesive metal
238 ISSN 1562-6016. ВАНТ. 2014. №6(94)
sublayer deposition. During the stage of amorphous
carbon DLC coating deposition the substrate
temperature limit of 45°C was set. Temperature was
simultaneously measured by an industrial PT-100
thermocouple mounted in the center of the chamber.
The thickness of the synthesized amorphous carbon
DLC thin films was determined according to the data
published by T.J. Moravec [5]. This method is based on
a comparison of the coating interference color with
standard colors for a diamond-like carbon coating with a
known refractive index. Furthermore, the thickness was
monitored using calotest method.
Quantity estimation of the surface defects emerged
during the synthesis of carbon coatings was made
according to the method described in [3]. A HOMMEL-
ETAMIC T8000 stylus profilometer was used to
measure surface roughness of DLC thin films deposited
onto HSS substrate. Also profilometer was used to
determine the film stress by using the radius of
curvature technique that compares the curvatures of
bare silicon substrates Si (100) cut-out from 0.5 mm
thick plate and substrates covered with a thin film.
Stoney's equation was used to calculate the stress [6].
Measurements of hardness and Young's modulus
were performed using the nanohardness testing
instrument Fischerscope HM 2000 and DCM Nano
Indenter® XP produced by the company MTS with
Berkovich pyramid indenter. Adhesive properties were
measured using the scratch tester REVETEST®
produced by the company CSM, as well as by Daimler-
Benz method, according to VDI 3198 standard, using
Rockwell indenter.
Tribological tests of the coatings were performed on
T10 device in accordance with the method of ball-on-
disc. Ceramic Al2O3 ball (Ø10 mm) was used as the
counter-body. Following test parameters were used: the
normal load L = 20 N, sliding speed V=0.2 m/s; radius
of the friction track R = 10 mm. Tribological tests were
performed in ambient air with a relative humidity of
40…50 %. To measure the dimensions of the wear track
HOMMEL-ETAMIC T8000 stylus profilometer was
used.
2. RESULTS AND DISCUSSION
Table presents the thickness of the DLC coatings
fabricated in various modes, their structural
characteristics, as well as the test results of the samples.
It can be seen that the thickness of the coatings is
strongly dependent on the used mode of deposition.
Since the duration of the processes in the experiments
was fixed, it indicates a different deposition rate. As
might be expected, the maximum deposition rate
observed in the mode 1 (unfiltered vacuum arc plasma,
DC + high current pulses). In this case the coating
thickness reached 0.9 μm.
According to optical microscopy, defects in form of
the droplets occupy about 30 % of the coating surface in
case deposition from the unfiltered plasma. However,
use of a high current pulsed vacuum arc mode promotes
deposition with droplets of a small size. The droplet size
distribution is presented in Fig. 1. Size almost 85 % of
the droplets does not exceed 1.4 microns. According
profilometer data, the surface roughness Ra of the
coating is of 0.14 microns. Using the filter during
coating deposition in a pulsed (mode 2) allows improve
the quality of the surface, but at the same time the
deposition rate drops 4 times.
0 2 4 6 8 10
0
25
50
75
100
Average size of droplet, m
%
0 2 4 6 8 10 0 2 4 6 8 10
mode 2mode 3mode 1
Fig. 1. Droplets size distributions on the surface of the
DLC coatings deposited in different modes
Characteristics of the DLC coatings deposited in different modes
№
m
o
d
e
M
o
d
e
ch
ar
ac
te
ri
za
ti
o
n
T
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ic
k
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es
s,
µ
m
S
u
rf
ac
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o
cc
u
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ie
d
b
y
d
ef
ec
ts
,
%
H
ar
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es
s,
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Y
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's
m
o
d
u
lu
s,
G
P
a
S
tr
es
s,
G
P
a
R
a,
µ
m
Scratch testing Wear testing
L
c1
,
N
L
c2
,
N
F
ri
ct
io
n
c
o
ef
fi
ci
en
t
T
es
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1
nonfiltered
DC+ pulses
0.90 30 15 131 3.6 0.14 16 52 <0.12 2 0.31 0.65 <0.18
2
filtered
DC+ pulses
0.25 10 48.2 441 8.6 0.02 22 45 <0.05 1 0.12 0.23 <0.17
3
filtered
DC
0.10 6 51.1 415 15.6 0.01 6 18 <0.05 - - - -
Number of droplets on the surface of the coating
reduced to 10 %, the content of the drops smaller than
1.4 micron size increases to almost 90 %, and the
surface roughness is reduced to 0.02 microns. Surface of
the coating deposited from the filtered plasma in the
mode 3 (DC arc current) is visually identical to that in
the pulse mode. Drops occupy only 6 % of the surface
area of the coating, and their size distribution is almost
ISSN 1562-6016. ВАНТ. 2014. №6(94) 239
identical to that of the mode 2. Surface roughness is of
0.01 microns. However, the deposition rate of the
coating is the lowest, 2.5 times lower than when using
the pulsed mode, and nearly 10 times lower than at the
deposition without filter.
It is known that the wear resistance of the coatings is
influenced by many interrelated factors: the hardness
parameter H/E, the level of residual stress, surface
roughness, the adhesion to the substrate. DLC coatings
deposited from the filtered plasma, characterized by a
hardness of about 50 GPa, indicating high content of
sp
3
-bonds. The hardness of the coating deposited from
the unfiltered plasma is much lower, about 15 GPa.
Decrease in hardness is due to decrease in the content of
the sp
3
bonds associated with high content of the
graphite drop component with sp
2
bonds. In this case, all
coatings have similar values of the parameter H/E in the
range 0.11…0.12.
An important characteristic of coatings is also the
quality of the adhesion to the substrate. One of the
methods for estimating the adhesion of the films is
Daimler-Benz method (Rockwell indenter test). The
coatings at the edges of the prints do not break down
and not peel off from the substrate, showing a fairly
good adhesion. At higher magnification only small
cracks in the coating at the edge of the print are shown.
a b c
Fig. 2. Scratch marks obtained on tested DLC coatings: a – mode 1; b – mode 2; c – mode 3
More information gives a scratch test. Photographs
of the scratch tracks on the surface of the DLC coatings
are presented in Fig. 2. Load values LC1, when starting
the coating cracking and load LC2, at which the coating
begins to delaminate from the substrate, and the friction
coefficient are shown in Table. It can be seen that the
coating formed from the filtered plasma at DC arc mode
(mode 3) exhibits inferior adhesion. The value of the
load LC1, when seen the first crack in the scratches, is
6 N and LC2 = 18 N. Then there are significant chips of
the coating material on the edges of the scratch track.
Coatings deposited in pulse modes show a much better
adhesion to the substrate. Load values LC1 and LC2 for
mode 2 are of 22 N and 45 N, and for the mode 1 is
16 N and 52 N, respectively. There are no chips on the
edges of the scratches.
Presumably, the differences in the nature of coating
damage during scratch testing are determined by the
difference in the level of compressive residual stresses
that are generated in the coating during deposition.
Cracking observed in the coating deposited from the
filtered plasma in a DC mode where the stress level is
extremely high – 15.6 GPa. At pulsed arc mode
deposition the level of residual stresses reduced to
8.6 GPa. Perhaps the processes that allow reduce stress,
similar to those that occur when the stress relaxation
occurs in the coatings deposited at a high-voltage pulsed
substrate bias potential [7]. In the coatings deposited in
a pulsed mode without plasma filtration the stress level
is even lower – 3.6 GPa. This may be due to a
compensatory role of defects in form of droplets which
occupy a considerable part of the volume of the coating.
By reducing stress, coatings deposited in pulse mode
not break off on scratch testing.
Thus, the vacuum-arc method of producing DLC
coatings when the DC vacuum arc superimposed with
high-current pulses has several advantages over a
simple DC method: higher deposition rate, relatively
low level of residual stress, high adhesion to the
substrate. The pulsed DLC coating also showed good
tribological characteristics in tests. At the initial stage of
the test a process of the "run-in" asperities on the
coatings surface takes place. The coefficient of friction
is sufficiently high. For coatings with low surface
roughness deposited from the filtered plasma (mode 2),
it reaches a value of 0.3 and unfiltered (mode 1) – 0.45.
After 100…150 s testing the coefficient of friction in
both cases dramatically decreases and during total test
time does not exceed 0.17 (Table).
Despite the significant differences in structural and
mechanical properties of the coatings the mean rate of
groove wear growth is not fundamentally different. So,
after one hour test of the coating deposited from filtered
plasma, depth and width of the groove wear is
0.12 microns and 0.23 microns, respectively. For the
coating deposited from the unfiltered plasma, after two
hour testing duration these values were 0.31 microns
and 0.65 microns. Thus, the wear of the coating with a
high content of droplets and lower hardness is only
1.3 times faster than that of more “clean” and hard one.
CONCLUSIONS
A comparative study of the surface morphology,
mechanical and tribological properties of DLC coatings
produced using vacuum arc plasma in the arc DC mode
with superposition of high-current pulses and in their
absence were carried out.
240 ISSN 1562-6016. ВАНТ. 2014. №6(94)
It was established that the method of vacuum-arc
deposition DC with superimposed pulses of high current
arc in the C55CT INOVAP installation allows 2.5-fold
increase in the deposition rate of DLC coating, reduces
the residual compressive stresses in the coatings,
substantially improves the adhesion to the substrate and
simultaneously provides good friction characteristics.
DLC coatings deposited by this method from the
filtered plasma characterized by high hardness 48 GPa,
a low amount of defects in form of droplets and the
surface roughness close to the substrate surface
roughness of 0.02 microns. In case deposition from the
unfiltered plasma the coating hardness is reduced to
15 GPa, and the roughness increased by an order as a
result of increasing the number of defects. The size of
most of the defects remains practically unchanged and
does not exceed 1.4 μm. The coatings produced in both
modes show good tribological properties. After a short
coatings break-friction, the coefficient of friction does
not exceed 0.17.
When the coating should be deposited on the parts
and components that do not require high-end surface
finish, deposition from the unfiltered DC arc plasma in
superposition with high-current pulses can be
recommend, which provides the deposition rate four
times higher than that of the filtered one using
electromagnetic linear Venetian blind filter. Deposition
DLC coatings on the high-precision components
requires use deposition mode with filtration of plasma.
ACKNOWLEDGEMENTS
This work was supported by IMBeing-FP7-
PEOPLE-2013-IRSES-612593 Project.
REFERENCES
1. V.E. Strel’nitskij. Vacuum-arc synthesis of the DLC
films: history, novel designs, applications, perspectives
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Article received 26.10.2014
СВОЙСТВА АЛМАЗОПОДОБНЫХ ПОКРЫТИЙ (АПП), НАНЕСЕННЫХ ПРИ ПОМОЩИ
ВАКУУМНОЙ ДУГИ ПОСТОЯННОГО ТОКА И ПОСТОЯННОГО ТОКА С НАЛОЖЕНИЕМ
ИМПУЛЬСОВ
В. Завалеев, Я. Валкович, Д.С. Аксенов, А.А. Лучанинов, Е.Н. Решетняк, В.Е. Стрельницкий
Представлены результаты сравнительных исследований структуры, механических и трибологических
свойств алмазоподобных покрытий (АПП), осажденных методами разряда постоянного тока и постоянного
тока с наложением дополнительных импульсов при использовании вакуумно-дугового источника плазмы с
графитовым катодом. Установлено, что метод вакуумно-дугового осаждения постоянного тока с
наложенными импульсами сильноточной дуги позволяет увеличить скорость осаждения АПП, снижает
уровень остаточных напряжений сжатия в покрытиях, существенно улучшает адгезию к подложке и
одновременно обеспечивает хорошие характеристики трения. Анализируется влияние фильтрации
вакуумно-дуговой плазмы на скорость осаждения и характеристики покрытий.
ВЛАСТИВОСТІ АЛМАЗОПОДІБНИХ ПОКРИТТІВ (АПП), НАНЕСЕНИХ ЗА ДОПОМОГОЮ
ВАКУУМНОЇ ДУГИ ПОСТІЙНОГО СТРУМУ ТА ПОСТІЙНОГО СТРУМУ З НАКЛАДАННЯМ
ІМПУЛЬСІВ
В. Завалєєв, Я. Валкович, Д.С. Аксьонов, О.А. Лучанінов, О.М. Решетняк, В.Є. Стрельницький
Представлено результати порівняльних досліджень структури, механічних та трибологічних
властивостей алмазоподібних покриттів (АПП), осаджених методами розряду постійного струму та
постійного струму з накладанням додаткових імпульсів струму при використанні вакуумно-дугового
джерела плазми з графітовим катодом. Встановлено, що метод вакуумно-дугового осадження постійного
струму з додатковими імпульсами струму великої амплітуди дозволяє збільшити швидкість осадження
АПП, знижує рівень залишкових напружень стиску в покриттях, значно поліпшує адгезію до підкладки та
одночасно забезпечує добрі характеристики тертя. Аналізується вплив фільтрації вакуумно-дугової плазми
на швидкість осадження та характеристики покриттів,
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| id | nasplib_isofts_kiev_ua-123456789-81961 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T16:35:38Z |
| publishDate | 2014 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Zavaleyev, V. Walkowicz, J. Aksyonov, D.S. Luchaninov, A.A. Reshetnyak, E.N. Strel’nitskij, V.E. 2015-05-22T19:49:25Z 2015-05-22T19:49:25Z 2014 Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc / V. Zavaleyev, J. Walkowicz, D.S. Aksyonov, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2014. — № 6. — С. 237-240. — Бібліогр.: 7 назв. — англ. 1562-6016 PACS: 81.15.-z, 81.05.uj https://nasplib.isofts.kiev.ua/handle/123456789/81961 Comparative studies of the structure, mechanical and tribological properties of DLC coatings deposited in DC and DC with superimposed high current pulse modes of operation vacuum-arc plasma source with the graphite cathode are presented. Imposition the pulses of high current on DC vacuum-arc discharge allows both increase the deposition rate of DLC coating and reduce the residual compressive stress in the coatings what promotes substantial improvement the adhesion to the substrate. Effect of vacuum arc plasma filtration with Venetian blind filter on the deposition rate and tribological characteristics of the coatings analyzed. Представлены результаты сравнительных исследований структуры, механических и трибологических свойств алмазоподобных покрытий (АПП), осажденных методами разряда постоянного тока и постоянного тока с наложением дополнительных импульсов при использовании вакуумно-дугового источника плазмы с графитовым катодом. Установлено, что метод вакуумно-дугового осаждения постоянного тока с наложенными импульсами сильноточной дуги позволяет увеличить скорость осаждения АПП, снижает уровень остаточных напряжений сжатия в покрытиях, существенно улучшает адгезию к подложке и одновременно обеспечивает хорошие характеристики трения. Анализируется влияние фильтрации вакуумно-дуговой плазмы на скорость осаждения и характеристики покрытий. Представлено результати порівняльних досліджень структури, механічних та трибологічних властивостей алмазоподібних покриттів (АПП), осаджених методами розряду постійного струму та постійного струму з накладанням додаткових імпульсів струму при використанні вакуумно-дугового джерела плазми з графітовим катодом. Встановлено, що метод вакуумно-дугового осадження постійного струму з додатковими імпульсами струму великої амплітуди дозволяє збільшити швидкість осадження АПП, знижує рівень залишкових напружень стиску в покриттях, значно поліпшує адгезію до підкладки та одночасно забезпечує добрі характеристики тертя. Аналізується вплив фільтрації вакуумно-дугової плазми на швидкість осадження та характеристики покриттів. This work was supported by IMBeing-FP7-
 PEOPLE-2013-IRSES-612593 Project. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Низкотемпературная плазма и плазменные технологии Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc Свойства алмазоподобных покрытий (АПП), нанесенных при помощи вакуумной дуги постоянного тока и постоянного тока с наложением импульсов Властивості алмазоподібних покриттів (АПП), нанесених за допомогою вакуумної дуги постійного струму та постійного струму з накладанням імпульсів Article published earlier |
| spellingShingle | Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc Zavaleyev, V. Walkowicz, J. Aksyonov, D.S. Luchaninov, A.A. Reshetnyak, E.N. Strel’nitskij, V.E. Низкотемпературная плазма и плазменные технологии |
| title | Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc |
| title_alt | Свойства алмазоподобных покрытий (АПП), нанесенных при помощи вакуумной дуги постоянного тока и постоянного тока с наложением импульсов Властивості алмазоподібних покриттів (АПП), нанесених за допомогою вакуумної дуги постійного струму та постійного струму з накладанням імпульсів |
| title_full | Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc |
| title_fullStr | Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc |
| title_full_unstemmed | Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc |
| title_short | Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc |
| title_sort | properties of dlc coatings deposited by dc and dc with superimposed pulsed vacuum arc |
| topic | Низкотемпературная плазма и плазменные технологии |
| topic_facet | Низкотемпературная плазма и плазменные технологии |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/81961 |
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