About peculiarities of self-bias voltage formation in plasma-chemical reactors with controlled magnetic fields

• Published in: Вопросы атомной науки и техники
• Date: 2015
• Main Authors: Hladkovskiy, V.V., Fedorovich, O.A., Polozov, B.P., Kruglenko, M.P.
• Format: Article
• Language: English
• Published: Institute for Nuclear Research of NASU 2015
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82118
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: About peculiarities of self-bias voltage formation in plasma-chemical reactors with controlled magnetic fields / V.V. Hladkovskiy, О.A. Fedorovich, B.P. Polozov, M.P. Kruglenko // Вопросы атомной науки и техники. — 2015. — № 1. — С. 156-160. — Бібліогр.: 6 назв. — англ.

The peculiarities of self-bias voltage formation in plasma-chemical reactors (PCR) with controlled magnetic fields have been investigated. The dependences of self-bias voltages on the values and configurations of magnetic fields in PCR, as well as, on the pressures, gas flows, discharge currents, di...