Optimization of the collecting mirror location in the plasma source of extreme ultraviolet radiation

• Published in: Вопросы атомной науки и техники
• Date: 2015
• Main Authors: Borgun, Ie.V., Hrechko, Ya.O., Azarenkov, N.A., Dimitrova, V.D., Ryabchikov, D.L., Sereda, I.N., Hryhorenko, A.V., Tseluyko, A.F.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82144
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Optimization of the collecting mirror location in the plasma source of extreme ultraviolet radiation / Ie.V. Borgun, Ya.O. Hrechko, N.A. Azarenkov1, V.D. Dimitrova, D.L. Ryabchikov1, I.N. Sereda, A.V. Hryhorenko, A.F. Tseluyko // Вопросы атомной науки и техники. — 2015. — № 1. — С. 174-176. — Бібліогр.: 2 назв. — англ.

The paper is devoted to searching the optimal location of first collecting mirror in the extreme ultraviolet radiation plasma sources. It is shown that the system efficiency can be increased by 1.5…2.5 times in the case of elliptical plasma radiation pattern and the optimal location of the first col...