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Increasing of mass transfer efficiency at magnetron deposition of metal coating

The results of technological tests of longitudinal planar magnetron sputtering system (MSS) with a magnetically isolated anode working in pulse-modes with additional pulse heavy-current high-voltage supply source are presented. It is shown that efficiency of mass transfer in the pulse mode overcoati...

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Bibliographic Details
Published in:	Вопросы атомной науки и техники
Date:	2015
Main Authors:	Chunadra, A.G., Sereda, K.N., Tarasov, I.K., Bizyukov, A.A.
Format:	Article
Language:	English
Published:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
Subjects:	Низкотемпературная плазма и плазменные технологии
Online Access:	https://nasplib.isofts.kiev.ua/handle/123456789/82146
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Journal Title:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:	Increasing of mass transfer efficiency at magnetron deposition of metal coating / A.G. Chunadra, K.N. Sereda, I.K. Tarasov, A.A. Bizyukov // Вопросы атомной науки и техники. — 2015. — № 1. — С. 181-183. — Бібліогр.: 4 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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