Growth of forest of single-walled carbon nanotubes at inhomogenious fluxes from plasma

• Published in: Вопросы атомной науки и техники
• Date: 2015
• Main Authors: Burmaka, G.P., Denysenko, I.B., Azarenkov, N.A.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82147
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Growth of forest of single-walled carbon nanotubes at inhomogenious fluxes from plasma / G.P. Burmaka, I.B. Denysenko, N.A. Azarenkov // Вопросы атомной науки и техники. — 2015. — № 1. — С. 184-186. — Бібліогр.: 5 назв. — англ.

The growth of forest of single-walled carbon nanotubes (SWCNTs) in plasma-enhanced chemical vapor deposition (PECVD) is studied using a deposition model. The inhomogeneity in deposition of neutrals from plasma on the SWCNTs, which is typical for growth of the nanostructures in PECVD, is accounted fo...