Growth of forest of single-walled carbon nanotubes at inhomogenious fluxes from plasma

The growth of forest of single-walled carbon nanotubes (SWCNTs) in plasma-enhanced chemical vapor deposition (PECVD) is studied using a deposition model. The inhomogeneity in deposition of neutrals from plasma on the SWCNTs, which is typical for growth of the nanostructures in PECVD, is accounted fo...

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Bibliographic Details
Date:2015
Main Authors: Burmaka, G.P., Denysenko, I.B., Azarenkov, N.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
Series:Вопросы атомной науки и техники
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/82147
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Growth of forest of single-walled carbon nanotubes at inhomogenious fluxes from plasma / G.P. Burmaka, I.B. Denysenko, N.A. Azarenkov // Вопросы атомной науки и техники. — 2015. — № 1. — С. 184-186. — Бібліогр.: 5 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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