Impact of N₂+H₂ mixture plasma on carbon-containing film
The short review is done of published data on impact of plasma produced in the N₂+H₂ mixture on carbon and organic films. It is concluded that such plasma can be much more effective in cleaning of the walls of fusion devices from a carbon-based contaminating deposit in comparison with plasmas of...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2006 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2006
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/82153 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Impact of N₂+H₂ mixture plasma on carbon-containing film / V.S. Voitsenya, S. Masuzaki, O. Motojima, A. Sagara, W. Jacob // Вопросы атомной науки и техники. — 2006. — № 6. — С. 141-143. — Бібліогр.: 16 назв. — англ. |