Calculations for parameters of a stationary reflex discharge
A variant of the stationary reflex discharge model based on the global (volume-averaged) model is under consideration. The calculation is carried out on the plasma electron density and temperature as a function of the adsorbed power in the reflex discharge, magnetic field value and initial gas press...
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| Date: | 2015 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2015
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/82243 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Calculations for parameters of a stationary reflex discharge / Yu.V. Kovtun, A.N. Ozerov, A.I. Skibenko, E.I. Skibenko, V.B. Yuferov // Вопросы атомной науки и техники. — 2015. — № 1. — С. 201-204. — Бібліогр.: 22 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | A variant of the stationary reflex discharge model based on the global (volume-averaged) model is under consideration. The calculation is carried out on the plasma electron density and temperature as a function of the adsorbed power in the reflex discharge, magnetic field value and initial gas pressure. The density of neutral atoms and cathode material ions coming into the discharge by the cathode sputtering mechanism is determined. |
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