Double magnetron cluster set-up for synthesis of micro and nano structure coatings

• Published in: Вопросы атомной науки и техники
• Date: 2015
• Main Authors: Yakovin, S., Zykov, A., Dudin, S., Sergiec, M., Farenik, V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2015
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82244
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Double magnetron cluster set-up for synthesis of micro and nano structure coatings / S. Yakovin, A. Zykov, S. Dudin, M. Sergiec, V. Farenik // Вопросы атомной науки и техники. — 2015. — № 1. — С. 187-189. — Бібліогр.: 6 назв. — англ.

In the present paper, the results studying the technological regimes of reactive magnetron sputtering in cluster set-up with two planar magnetrons, plasma source and medium energy ion source are presented. Magnetron current-voltage characteristics as well as dependencies of the magnetron current, vo...