Dudin, S., Zykov, A., Dahov, A., & Farenik, V. (2006). Experimental research of ICP reactor for plasma-chemical etching. Вопросы атомной науки и техники.
Chicago Style (17th ed.) CitationDudin, S.V, A.V Zykov, A.N Dahov, and V.I Farenik. "Experimental Research of ICP Reactor for Plasma-chemical Etching." Вопросы атомной науки и техники 2006.
MLA (8th ed.) CitationDudin, S.V, et al. "Experimental Research of ICP Reactor for Plasma-chemical Etching." Вопросы атомной науки и техники, 2006.
Warning: These citations may not always be 100% accurate.