Coating in the arc discharges with plasma flow filtration
Experimental results of coating deposition with application of an “open architecture” filter to reduce the dropwise component in the discharge [1,2] are presented in this paper. The filter is located in a separate chamber conjugate with the presented system. A curvilinear (with an angle 90°) solen...
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| Datum: | 2006 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2006
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| Schriftenreihe: | Вопросы атомной науки и техники |
| Schlagworte: | |
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/82292 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Coating in the arc discharges with plasma flow filtration / V. V. Gasilin, V.A. Zavaleyev, Yu. N. Nezovibat’ko, O.M. Shvets, V.S. Taran, E.V. Skorina // Вопросы атомной науки и техники. — 2006. — № 6. — С. 210-212. — Бібліогр.: 3 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | Experimental results of coating deposition with application of an “open architecture” filter to reduce the dropwise
component in the discharge [1,2] are presented in this paper. The filter is located in a separate chamber conjugate with
the presented system. A curvilinear (with an angle 90°) solenoid creating a transporting magnetic field [3] is used as the
“open architecture” filter. Performing probe measurements of the ion saturation current dependences on the current of
focussing coil, pressure of inert gas (argon) and reactionary gas (nitrogen). The measurement results of substrate
temperature, deposition rate of coating. |
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