Coating in the arc discharges with plasma flow filtration

• Published in: Вопросы атомной науки и техники
• Date: 2006
• Main Authors: Gasilin, V. V., Zavaleyev, V.A., Nezovibat’ko, Yu. N., Shvets, O.M., Taran, V.S., Skorina, E.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2006
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82292
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Coating in the arc discharges with plasma flow filtration / V. V. Gasilin, V.A. Zavaleyev, Yu. N. Nezovibat’ko, O.M. Shvets, V.S. Taran, E.V. Skorina // Вопросы атомной науки и техники. — 2006. — № 6. — С. 210-212. — Бібліогр.: 3 назв. — англ.

Experimental results of coating deposition with application of an “open architecture” filter to reduce the dropwise component in the discharge [1,2] are presented in this paper. The filter is located in a separate chamber conjugate with the presented system. A curvilinear (with an angle 90°) solen...