2D fluid model for interactive development of ICP technological tools

• Published in: Вопросы атомной науки и техники
• Date: 2006
• Main Authors: Gapon, A.V., Dahov, A.N., Dudin, S.V., Zykov, A.V., Azarenkov, N.A.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2006
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82306
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: 2D fluid model for interactive development of ICP technological tools / A.V. Gapon, A.N. Dahov, S.V. Dudin, A.V. Zykov, N.A. Azarenkov // Вопросы атомной науки и техники. — 2006. — № 6. — С. 186-188. — Бібліогр.: 3 назв. — англ.

The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working gas type are the input data. The results of calculation are inductor voltage, ion current density distribution on the chamber surface, steady state space distributions of the electric f...