Investigation of thin films deposition into porous material

• Published in: Вопросы атомной науки и техники
• Date: 2006
• Main Authors: Sedláková, L., Kolouch, A., Hladík, J., Spatenka, P.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2006
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/82307
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Investigation of thin films deposition into porous material / L. Sedláková, A. Kolouch, J. Hladík, P. Spatenka // Вопросы атомной науки и техники. — 2006. — № 6. — С. 207-209. — Бібліогр.: 6 назв. — англ.

Although the direct contact of the treated material with the plasma is assumed by the plasma community as a
 necessary condition of successful plasma treatment, several references mention penetration of active species into the
 porous material. Hydrophylity enhancement has been obser...